Thin-Film Deposition: Principles and Practice

Thin film deposition is a broad and burgeoning field, with applications ranging from razor blade coatings to quantum-well lasers. However, much of the available thin film literature is based on empirical knowledge, and focuses only on specific processes or applications. This volume rectifies that situation, offering a complete description od the theory and technology of thin film deposition. The book's broad perspective gives readers the tools to objectively evaluate and choose the appropriate thin film process for a specific application. This indispensable volume also includes a complete list of symbols and an extensive index.

(McGraw-Hill)

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Thin Film Technology.
Gas Kinetics.
Vacuum Technology.
Evaporation.
Deposition.
Epitaxy.
Chemical Vapor Deposition.
High-Energy Techniques.
Plasma Processes.
Film Characterization.

(McGraw-Hill)