Materials Science in Microelectronics I (e-bok)
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E-bok
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PDF med LCP-kryptering (0.0 MB)
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Språk
Engelska
Antal sidor
270
Utgivningsdatum
2010-07-07
Förlag
Elsevier Science
ISBN
9780080459608

Materials Science in Microelectronics I E-bok

The Relationships Between Thin Film Processing and Structure

av Eugene MacHlin
E-bok (PDF, LCP),  Engelska, 2010-07-07
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Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship - that between processing and the structure of the thin-film. The state of the thin film's surface during the period that one monolayer exists - before being buried in the next layer - determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.
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