Chemistry for Electronic Materials (inbunden)

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Språk: Engelska
Antal sidor: 214
Utgivningsdatum: 1993-03-09
Förlag: Elsevier Science
ISBN: 9780444596901

Chemistry for Electronic Materials E-bok

Name: Chemistry for Electronic Materials
Price: 820.00 SEK
Availability: InStock
Author: K F Jensen, T Hirai, G Wahl, Yves Pauleau
ISBN: 9780444596901

av K F Jensen, T Hirai, G Wahl, Yves Pauleau

E-bok (PDF, LCP), Engelska, 1993-03-09

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The chemical aspects of materials processing used for electronic applications, e.g. Si, III-V compounds, superconductors, metallization materials, are covered in this volume. Significant recent advances have occurred in the development of new volatile precursors for the fabrication of III-V semiconductor and metal [Cu, W] films by OMCVD. Some fundamentally new and wide-ranging applications have been introduced in recent times. Experimental and modeling studies regarding deposition kinetics, operating conditions and transport as well as properties of films produced by PVD, CVD and PECVD are discussed. The thirty papers in this volume report on many other significant topics also. Research workers involved in these aspects of materials technology may find here some new perspectives with which to augment their projects.

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