Microelectromechanical Systems-Materials and Devices III: Volume 1222 (inbunden)
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Format
Inbunden (Hardback)
Språk
Engelska
Antal sidor
211
Utgivningsdatum
2010-06-18
Förlag
Cambridge University Press
Medarbetare
Sheppard, Jr, Norman F. / Turner, Keviin T. / Vengallatore, Srikar
Illustratör/Fotograf
Illustrations
Illustrationer
illustrations
Volymtitel
Volume 1222
Antal komponenter
1
ISBN
9781605111957
Microelectromechanical Systems-Materials and Devices III: Volume 1222 (inbunden)

Microelectromechanical Systems-Materials and Devices III: Volume 1222

Symposium Held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

Inbunden Engelska, 2010-06-18
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Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
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