Microelectromechanical Systems-Materials and Devices III: Volume 1222 (inbunden)

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Format: Inbunden (Hardback)
Språk: Engelska
Antal sidor: 211
Utgivningsdatum: 2010-06-18
Förlag: Cambridge University Press
Medarbetare: Sheppard, Jr, Norman F. / Turner, Keviin T. / Vengallatore, Srikar
Illustratör/Fotograf: Illustrations
Illustrationer: illustrations
Volymtitel: Volume 1222
Dimensioner: 234 x 155 x 18 mm
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Antal komponenter: 1
ISBN: 9781605111957

Microelectromechanical Systems-Materials and Devices III: Volume 1222

Name: Microelectromechanical Systems-Materials and Devices III: Volume 1222
Price: 1401.00 SEK
Availability: OutOfStock
Author: Jrg Bagdahn
ISBN: 9781605111957

Symposium Held November 30-December 2, 2009, Boston, Massachusetts, U.S.A.

av Jrg Bagdahn

Inbunden, Engelska, 2010-06-18

1401

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Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.

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