M. Elwenspoek – författare
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4 produkter
Silicon Micromachining
Av M. Elwenspoek, H. V. Jansen
Häftad, 2004
1172 kr
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This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. Recent advances in these techniques have made it possible to create a new generation of microsystem devices, such as microsensors, accelerometers, micropumps, and …
Mechanical Microsensors
Av M. Elwenspoek, R. Wiegerink
Inbunden, 2000
2188 kr
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This book provides a comprehensive description of microsensors for mechanical quantities (flow, pressure, force, inertia) fabricated by silicon micromachining. Since the design of such sensors requires interdisciplinary teamwork, the presentation is made accessible to engineers trained in …
Mechanical Microsensors
Av M. Elwenspoek, R. Wiegerink
Häftad, 2010
2188 kr
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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. …
Mechanical Microsensors
Av R. Wiegerink, M. Elwenspoek
E-bok, 2012
2925 kr
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This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. …
