Integration of Ferroelectric and Piezoelectric Thin Films

Emmanuel Defaÿ, Senior scientist at CEA LETI Minatec. currently gives seminars at INPG Grenoble, Ecole Centrale Lille and Lyon and he is lecturer in Ecole Centrale Paris on new materials.

"While of course technical, the book is clearly written, well-illustrated, and includes chapter bibliographies." (Booknews, 1 June 2011)

• Preface xiiiEmmanuel DEFAŸGeneral Introduction xviiChapter 1. Dielectricity, Piezoelectricity, Pyroelectricity and Ferroelectricity 1Emmanuel DEFAŸ1.1. Crystal structure 11.2. Piezoelectricity, pyroelectricity and ferroelectricity definitions 91.3. Simplified examples 101.4. Three typical structures: wurtzite, ilmenite and perovskite 161.5. Bibliography 23Chapter 2. Thermodynamic Study: a Structural Approach 25Emmanuel DEFAŸ2.1. History 252.2. Revisiting statistical thermodynamics 262.3. State functions 412.4. Linear equations −?npiezoelectricity 442.5. Non linear equations −?nelectrostriction 472.6. Bibliography 48Chapter 3. Ferroelectric-paraelectric Phase Transition Thermodynamic Modeling 49Emmanuel DEFAŸ3.1. Hypothesis on Gibbs’ elastic energy 493.2. Second-order transition 523.3. Effects of stresses 583.4. First-order transition 603.5. Conclusion 653.6. Bibliography 65Chapter 4. Mechanical Formalism 67Emmanuel DEFAŸ4.1. Introduction 674.2. Hooke’s law 674.3. Definitions of local strains 694.4. Definition of local strains 774.5. Stress-strain relation 834.6. Elastic energy density 864.7. Expression of the elasticity tensor as a function of elements of symmetry 894.8. Bibliography 93Chapter 5. Dielectric Formalism 95Emmanuel DEFAŸ5.1. Introduction 955.2. The dielectric effect seen by Faraday 955.3. Electric polarization and displacement 995.4. The dielectric constant 1045.5. The local field in dielectrics: polarization catastrophe 1055.6. Dielectric relaxation 1095.7. Electric energy density 1155.8. Bibliography 117Chapter 6. Piezoelectric Formalism 119Emmanuel DEFAŸ and Mathieu PIJOLAT6.1. Thermodynamic equations 1196.2. Reducing coefficients using crystal symmetry 1216.3. One-dimensional microscopic model 1266.4. Electromechanical coupling coefficient 1306.5. Piezoelectric coefficients of key materials 1346.6. Calculating coupling as a function of crystal orientation 1366.7. Piezoelectric coefficients in the case of ferroelectric materials 1386.8. Relation between piezoelectric formalism and matter 1396.9. Bibliography 141Chapter 7. Acoustic Formalism 143Alexandre REINHARDT7.1. Propagation of bulk waves 1437.2. Bulk wave resonator 1637.3. Bulk acoustic waves filter 1857.4. Bibliography 190Chapter 8. Electrostrictive Formalism 191Emmanuel DEFAŸ8.1. Foundations of electrostriction 1918.2. Thermodynamic model of electrostriction – case of the resonator 1928.3. The electrostriction tensor 1958.4. Microscopic model of electrostriction 1978.5. Electrostrictive resonator 2028.6. Bibliography 206Chapter 9. Electric Characterization 207Emmanuel DEFAŸ, Gwenaël LE RHUN and Emilien BOUYSSOU9.1. Static piezoelectric characterization of thin films 2079.2. Piezoelectric and atomic force microscopy 2159.3. Ferroelectric measurement 2259.4. Dielectric measurement 2329.5. Leakage current in metal/insulator/metal structures 2369.6. Bibliography 245Chapter 10. Piezoelectric Resonators and Filters 249Alexandre REINHARDT and Christophe BILLARD10.1. Acoustic resonators: principle and history 24910.2. BAW technology 26910.3. CRF technology 28310.4. Bibliography 291Chapter 11. High Overtone Bulk Acoustic Resonator (HBAR) 297Mathieu PIJOLAT, Chrystel DEGUET and Sylvain BALLANDRAS11.1. About HBAR 29711.2. Technology 30211.3. Examples of implementations 30511.4. Conclusions about HBAR 31211.5. Bibliography 313Chapter 12. Electrostrictive Resonators 315Alexandre VOLATIER, Brice IVIRA, Christophe ZINCK, Nizar BEN HASSINE and Emmanuel DEFAŸ12.1. Introduction 31512.2. State of the art 31612.3. Experimental implementations 32612.4. Simulation of a filter with electrostrictive resonators 34112.5. Status of perovskite electrostrictive resonators 34212.6. PZT-based tunable frequency ferroelectric acoustic resonator 34412.7. Nonlinear effect in piezoelectric AlN 34812.8. Conclusion with electrostriction 35412.9. Bibliography 355Chapter 13. Thin Film Piezoelectric Transducers 357Matthieu CUEFF, Patrice REY, Fabien FILHOL and Emmanuel DEFAŸ13.1. Introduction 35713.2. State of the art 35813.3. Resonant membranes 36113.4. Resonant micromirror 36613.5. Piezoelectric micro-switch 37113.6. Sign of piezoelectric coefficients 39113.7. Bibliography 394List of Authors 397Index 399