Microelectromechanical Systems: Volume 1139 (häftad)
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Format
Inbunden (Hardback)
Språk
Engelska
Serie
MRS Proceedings
Antal sidor
264
Utgivningsdatum
2009-06-23
Förlag
Cambridge University Press
Medarbetare
Vengallatore, Srikar (McGill University, Montreal) (red.) / Bagdahn, Jorg (red.) / Spearing, S. Mark (University of Southampton) (red.) / Sheppard, Jr Norman F. (red.)
Dimensioner
234 x 155 x 18 mm
Vikt
477 g
ISBN
9781605111117

Microelectromechanical Systems: Volume 1139

Materials and Devices II

av Srikar Vengallatore, JöRg Bagdahn, Jr Sheppard Norman F, S Mark Spearing, Jörg Bagdahn
Inbunden,  Engelska, 2009-06-23
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Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.
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