Emanuele Rimini - Böcker

Semiconductors lie at the heart of some of the most important industries and technologies of the 20th century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. In this volume, world experts discuss the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality and crystal growth. Particular emphasis is placed on silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a critical fashion.

This text presents a collection of research dealing with several aspects of ion implantation, including basic information on the physics of devices, ion implanters, channelling implants, yield, damage and its annealing, in addition to a host of other topics. Particular attention has been paid to those techniques that provide: two-dimensional profiles of damage and of dopants; a careful treatment of silicon based devices; threshold voltage control; shallow junctions; minority carrier lifetime control by metallic ion implants; and high energy implants is given in this work. Based on a course preceding the biannual Ion Implantation Technology Conference, this book should be a valuable reference for physicists, chemists, materials scientists, processing, device production, device design, and ion beam engineers interested in any aspect of ion implantation, as well as a secondary text for a graduate course on the subject.

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci­ entists, processing, device production, device design and ion beam engineers are all involved in this subject. The present monography deals with several aspects of ion implantation. The first chapter covers basic information on the physics of devices together with a brief description of the main trends in the field. The second chapter is devoted to ion im­ planters, including also high energy apparatus and a description of wafer charging and contaminants. Yield is a quite relevant is­ sue in the industrial surrounding and must be also discussed in the academic ambient. The slowing down of ions is treated in the third chapter both analytically and by numerical simulation meth­ ods. Channeling implants are described in some details in view of their relevance at the zero degree implants and of the available industrial parallel beam systems. Damage and its annealing are the key processes in ion implantation. Chapter four and five are dedicated to this extremely important subject.