Nanometer-scale Defect Detection Using Polarized Light

Pierre Richard Dahoo is Professor at the University of Versailles Saint-Quentin in France. His research interests include absorption spectroscopy, laser-induced fluorescence, ellipsometry, optical molecules, industrial materials, modeling and simulation. He is program manager of the Chair Materials Simulation and Engineering of UVSQ.Philippe Pougnet is a Doctor in Engineering. He is an expert in reliability and product-process technology at Valeo and is currently working for the Vedecom Institute in Versailles, France. He is in charge of assessing the reliability of innovative power electronic systems.Abdelkhalak El Hami is Professor at the Institut National des Sciences Appliquées (INSA-Rouen) in France and is in charge of the Normandy Conservatoire National des Arts et Metiers (CNAM) Chair of Mechanics, as well as several European pedagogical projects.

• Preface xiChapter 1 Uncertainties 11.1. Introduction 11.2. The reliability based design approach 21.2.1. The MC method 21.2.2. The perturbation method 31.2.3. The polynomial chaos method 71.3. The design of experiments method 91.3.1. Principle 91.3.2. The Taguchi method 101.4. The set approach 141.4.1. The method of intervals 151.4.2. Fuzzy logic based method 181.5. Principal component analysis 201.5.1. Description of the process 211.5.2. Mathematical roots 221.5.3. Interpretation of results 221.6. Conclusions 23Chapter 2 Reliability-based Design Optimization 252.1. Introduction 252.2. Deterministic design optimization 262.3. Reliability analysis 272.3.1. Optimal conditions 302.4. Reliability-based design optimization 312.4.1. The objective function 312.4.2. Total cost consideration 322.4.3. The design variables 332.4.4. Response of a system by RBDO 332.4.5. Limit states 332.4.6. Solution techniques 332.5. Application: optimization of materials of an electronic circuit board 342.5.1. Optimization problem 362.5.2. Optimization and uncertainties 392.5.3. Results analysis 432.6. Conclusions 44Chapter 3 The Wave–Particle Nature of Light 473.1. Introduction 483.2. The optical wave theory of light according to Huyghens and Fresnel 493.2.1. The three postulates of wave optics 493.2.2. Luminous power and energy 513.2.3. The monochromatic wave 513.3. The electromagnetic wave according to Maxwell’s theory 523.3.1. The Maxwell equations 523.3.2. The wave equation according to the Coulomb’s gauge 563.3.3. The wave equation according to the Lorenz’s gauge 573.4. The quantum theory of light 573.4.1. The annihilation and creation operators of the harmonic oscillator 573.4.2. The quantization of the electromagnetic field and the potential vector 613.4.3. Field modes in the second quantization 66Chapter 4 The Polarization States of Light 714.1. Introduction 714.2. The polarization of light by the matrix method 734.2.1. The Jones representation of polarization 764.2.2. The Stokes and Muller representation of polarization 814.3. Other methods to represent polarization 864.3.1. The Poincaré description of polarization 864.3.2. The quantum description of polarization 884.4. Conclusions 93Chapter 5 Interaction of Light and Matter 955.1. Introduction 955.2. Classical models 975.2.1. The Drude model 1035.2.2. The Sellmeir and Lorentz models 1055.3. Quantum models for light and matter 1115.3.1. The quantum description of matter 1115.3.2. Jaynes–Cummings model 1185.4. Semiclassical models 1235.4.1. Tauc–Lorentz model 1275.4.2. Cody–Lorentz model 1305.5. Conclusions 130Chapter 6 Experimentation and Theoretical Models 1336.1. Introduction 1346.2. The laser source of polarized light 1356.2.1. Principle of operation of a laser 1366.2.2. The specificities of light from a laser 1416.3. Laser-induced fluorescence 1436.3.1. Principle of the method 1436.3.2. Description of the experimental setup 1456.4. The DR method 1456.4.1. Principle of the method 1466.4.2. Description of the experimental setup 1486.5. Theoretical model for the analysis of the experimental results 1496.5.1. Radiative relaxation 1526.5.2. Non-radiative relaxation 1536.5.3. The theoretical model of induced fluorescence 1606.5.4. The theoretical model of the thermal energy transfer 1636.6. Conclusions 170Chapter 7 Defects in a Heterogeneous Medium 1737.1. Introduction 1737.2. Experimental setup 1757.2.1. Pump laser 1767.2.2. Probe laser 1767.2.3. Detection system 1777.2.4. Sample preparation setup 1807.3. Application to a model system 1827.3.1. Inert noble gas matrix 1827.3.2. Molecular system trapped in an inert matrix 1847.3.3. Experimental results for the induced fluorescence 1887.3.4. Experimental results for the double resonance 1987.4. Analysis by means of theoretical models 2037.4.1. Determination of experimental time constants 2037.4.2. Theoretical model for the induced fluorescence 2097.4.3. Theoretical model for the DR 2147.5. Conclusions 216Chapter 8 Defects at the Interfaces 2198.1. Measurement techniques by ellipsometry 2198.1.1. The extinction measurement technique 2228.1.2. The measurement by rotating optical component technique 2238.1.3. The PM measurement technique 2248.2. Analysis of results by inverse method 2258.2.1. The simplex method 2328.2.2. The LM method 2348.2.3. The quasi-Newton BFGS method 2378.3. Characterization of encapsulating material interfaces of mechatronic assemblies 2378.3.1. Coating materials studied and experimental protocol 2398.3.2. Study of bulk coatings 2418.3.3. Study of defects at the interfaces 2448.3.4. Results analysis 2518.4. Conclusions 253Chapter 9 Application to Nanomaterials 2559.1. Introduction 2559.2. Mechanical properties of SWCNT structures by MEF 2569.2.1. Young's modulus of SWCNT structures 2589.2.2. Shear modulus of SWCNT structures 2599.2.3. Conclusion on the modeling results 2609.3. Characterization of the elastic properties of SWCNT thin films 2609.3.1. Preparation of SWCNT structures 2619.3.2. Nanoindentation 2629.3.3. Experimental results 2639.4. Bilinear model of thin film SWCNT structure 2659.4.1. SWCNT thin film structure 2669.4.2. Numerical models of thin film SWCNT structures 2689.4.3. Numerical results 2699.5. Conclusions 274Bibliography 275Index 293