Applications and Metrology at Nanometer Scale 1

Pierre Richard Dahoo is Professor and Holder of the Chair of Materials Simulation and Engineering at the University of Versailles Saint-Quentin in France. He is Director of Institut des Sciences et Techniques des Yvelines and a specialist in modeling and spectroscopy at the LATMOS laboratory of the CNRS. Philippe Pougnet is a former expert in reliability and the technologyproduct-process of embedded mechatronic systems. He graduated from Université Grenoble Alpes and Grenoble INP in France. Abdelkhalak El Hami is Professor at the Institut National des Sciences Appliquées (INSA-Rouen Normandie) in France and is in charge of the Normandy Conservatoire National des Arts et Metiers (CNAM) Chair of Mechanics, as well as several European pedagogical projects.

• Preface ixIntroduction xiiiChapter 1 Nanometer Scale 11.1 Introduction 11.2 Sample elaboration 61.2.1 Physical and chemical method: spin coating 91.2.2 Physical method: cathode sputtering 121.2.3 Physical method: laser ablation 141.3 Characterization of samples 201.3.1 Scanning electron microscope 261.3.2 Atomic force microscope 301.3.3 Infrared spectroscopy (FTIR/ATR) 331.4 Conclusion 451.5 Appendix: light ray propagation 46Chapter 2 Statistical Tools to Reduce the Effect of Design Uncertainties 512.1 Introduction 512.2 Review of fundamental definitions in probability theory 522.2.1 Definitions and properties 522.2.2 Random variables 542.2.3 Random vectors 552.2.4 Static moments 562.2.5 Normal probability functions 602.2.6 Uniform probability function 612.3 Random process and random field 622.4 Mathematical formulation of the model 642.5 Reliability-based approach 652.5.1 Monte Carlo method 652.5.2 Perturbation method 662.5.3 Polynomial chaos method 702.6 Design of experiments method 712.6.1 Principle 712.6.2 Taguchi method 722.7 Set-based approach 762.7.1 The interval method 772.7.2 Fuzzy logic-based method 792.8 Analysis in terms of main components 822.8.1 Description of the approach 822.8.2 Mathematical basis 832.8.3 Interpretation of results 842.9 Applications 842.9.1 Rod mesh 842.9.2 Example of a linear oscillator 882.10 Conclusion 90Chapter 3 Electromagnetic Waves and Their Applications 913.1 Introduction 913.2 Characteristics of the energy carried by an electromagnetic wave 943.3 The energy of a plane monochromatic electromagnetic wave 983.3.1 Answer to question 1 993.3.2 Answer to question 2 1003.3.3 Answer to question 3 1003.3.4 Answer to question 4 1013.3.5 Answer to question 5 1013.3.6 Answer to question 6 1033.4 Rectangular waveguide as a high-pass frequency filter 1033.4.1 Answer to question 1 1053.4.2 Answer to question 2 1073.4.3 Answer to question 3 1083.4.4 Answer to question 4 1083.4.5 Answer to question 5 1093.4.6 Answer to question 6 1103.4.7 Answer to question 7 1113.4.8 Answer to question 8 1113.4.9 Answer to question 9 1113.4.10 Answer to question 10 1123.4.11 Answer to question 11 1123.4.12 Answer to question 12 1123.4.13 Answer to question 13 1133.4.14 Answer to question 14 1133.4.15 Answer to question 15 1143.5 Characteristics of microwave antennas 1143.5.1 Introduction to antennas 1153.5.2 Radiation of a wire antenna 1223.6 Characteristics of networks of microwave antennas 1343.6.1 Introduction to networks of microwave antennas 1343.6.2 Radiation of antenna networks 137Chapter 4 Smart Materials 1474.1 Introduction 1474.2 Smart systems and materials 1504.3 Thermodynamics of couplings in active materials 1584.3.1 Thermo-mechanical and thermoelastic coupling 1584.3.2 Multiphysics couplings 1724.4 Exercises on the application of active materials 1844.4.1 Strain tensor for 2D thin films 1844.4.2 A piezoelectric accelerometer 1904.4.3 Piezoelectric transducer 1934.4.4 Piezoelectric sensor 1984.5 Appendix: crystal symmetry 202Appendix 205References 211Index 217