Spectroscopic Ellipsometry and Reflectometry (inbunden)
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Format
Inbunden (Hardback)
Språk
Engelska
Antal sidor
248
Utgivningsdatum
1999-04-06
Förlag
John Wiley & Sons Inc
Medarbetare
McGahan (förf.) / Tompkins, Harland G (förf.) / McGahan, William A (förf.)
Dimensioner
250 x 160 x 20 mm
Vikt
520 g
ISBN
9780471181729

Spectroscopic Ellipsometry and Reflectometry

A User's Guide

av Harland G Tompkins, William A McGahan, Harland G Tompkins, William A McGahan, Tompkins
Inbunden,  Engelska, 1999-04-06
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While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

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Övrig information

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

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