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Handbook of Chemicals and Gases for the Semiconductor Industry
Av Ashutosh Misra, Jeremiah D. Hogan m. fl.
Inbunden, 2002
3440 kr
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The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no …