Materials Aspects in Microsystem Technologies

AvD. Barbier,J.R. Morante

Inbunden, Engelska, 1999

Del 83 i serien European Materials Research Society Symposia Proceedings

1 778 kr

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Produktinformation

Utgivningsdatum:1999-08-13
Mått:210 x 279 x 0 mm
Vikt:740 g
Format:Inbunden
Språk:Engelska
Serie:European Materials Research Society Symposia Proceedings
Antal sidor:267
Förlag:Elsevier Science
ISBN:9780080436111

Utforska kategorier

Elektronik och kommunikationer inom Naturvetenskap och teknik

Innehållsförteckning

Chapter headings and selected papers: Materials Deposition and Microstructuring. Roughning and smoothing dynamics during KOH silicon etching (R. Divan et al.). Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems (P. Obreja et al.). Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition (F. Craciun et al.). Obtention and characterization of bioengineered layers onto silica-based microstructures (S. Falipou et al.). Microstructure of Cu-C interface in Cu-based metal matrix composite (A. Berner et al.). Porous Silicon in Microsystems. Porous silicon technique for realization of surface micromachined silicon structures with large gaps (H. Artmann, W. Frey). Characterization. Characterization of the nonlinear optical properties of crystals by the SHEW technique (R. Kremer et al.). Bonding and Packaging. Devices. Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients (X. Zhu et al.). Electrostatically actuated micromirror devices in silicon technology (W. Lang et al.). A thermoelectric converter for energy supply (H. Glosch et al.). Author index. Subject index.

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