Inertial Microsensors presents methods for analysis and design of inertial micromachined sensors, with the primary focus on accelerometers and gyroscopes. Micro accelerometers are a type of solid-state sensors which is used for measurement of linear acceleration, and subsequently velocity and displacement. Micro Gyroscopes are inertial sensors for direct measurement of either angular orientation or angular velocity. The aim of the book is to provide solid foundation in theory of inertial measurement, introduce design fundamentals, and provide design recipes for implementation of inertial instruments on the micro-scale. All discussions in the book are supported by constructive computational examples illustrating the material. The purpose of the book is to offer an overview of the field, introduce fundamental concepts, explicitly define design objectives for each type of inertial sensors, summarize solutions for achieving the design objectives, and discuss methods for fabrication, packaging, and testing micromachined accelerometers and gyroscopes.
