Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written." (Engineering Science & Education Jnl. April 2002)

• Preface. Microelectromechanical Systems. Fundamentals of Polymer Synthesis for MEMS. Stereolithography (SL). Microstereolithography Techniques I-Scanning Method.Microstereolithography Techniques II-Projection Method. Polymeric MEMS Architecture with Silicon, Metal, and Ceramics. Combined Silicon and Polymeric Structures.Micromolding.Applications. Appendix 1: Some Polymers for MEMS.Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography. Index.

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written." (Engineering Science & Education Jnl. April 2002)

• Preface. Microelectromechanical Systems. Fundamentals of Polymer Synthesis for MEMS. Stereolithography (SL). Microstereolithography Techniques I-Scanning Method.Microstereolithography Techniques II-Projection Method. Polymeric MEMS Architecture with Silicon, Metal, and Ceramics. Combined Silicon and Polymeric Structures.Micromolding.Applications. Appendix 1: Some Polymers for MEMS.Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography. Index.

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA.? Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.

"This book gives a fascinating introduction to the subject, and places it superbly within its context....It is original, timely and well written." (Engineering Science & Education Jnl. April 2002)

• Preface. Microelectromechanical Systems. Fundamentals of Polymer Synthesis for MEMS. Stereolithography (SL). Microstereolithography Techniques I-Scanning Method.Microstereolithography Techniques II-Projection Method. Polymeric MEMS Architecture with Silicon, Metal, and Ceramics. Combined Silicon and Polymeric Structures.Micromolding.Applications. Appendix 1: Some Polymers for MEMS.Appendix 2: An Example of CAD Model and NC Codes for Microstereolithography. Index.