Advanced RF MEMS

Stepan Lucyszyn is a Reader in the Optical and Semiconductor Devices group at Imperial College, London. He has published extensively on RF MEMS, and has lectured on the subject at university and on professional short courses. An experienced editor, he co-edited RFIC and MMIC Design and Technology (IET, 2001) and serves as a Member of the Editorial Board for the IEEE/ASME Journal of Microelectromechanical Systems. He is a Fellow of the IET and a Fellow of the Institute of Physics.

• 1. Introduction S. Lucyszyn; 2. Electromechanical modelling of electrostatic actuators D. Elata and V. Leus; 3. Switches and their fabrication technologies T. Lisec; 4. Niche switch technologies S. Lucyszyn, S. Pranonsatit, J. Y. Choi and A. Holmes; 5. Reliability I. De Wolf; 6. Dielectric charging G. Papaioannou; 7. Stress and thermal characterisation R. Y. Fillit and R. Fortunier; 8. High power handling F. Coccetti and R. Plana; 9. Packaging H. Tilmans, A. Jourdain and P. De Moor; 10. Impedance tuners and tuneable filters A. Pothier and T. Vähä-Heikkilä; 11. Phase shifters and tunable delay lines L. Dussopt; 12. Reconfigurable architectures T. Vähä-Heikkilä; 13. Industry roadmap for RF MEMS J. Bouchaud, R. Sorrentino, B. Knoblich, H. Tilmans and F. Coccetti.