Assistant Professor Qingsong Xu, University of Macau, China, has been working in the area of micro/nano-mechatronics and robotics including design and precision control of micro/nano-positioning systems for over 10 years. He has published over 140 peer-reviewed papers in journals and conferences in related domains.

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• Preface xiiiAcknowledgments xvii1 Introduction 11.1 Micropositioning Techniques 11.2 Compliant Guiding Mechanisms 21.2.1 Basic Flexure Hinges 21.2.2 Translational Flexure Hinges 31.2.3 Translational Positioning Mechanisms 41.2.4 Rotational Positioning Mechanisms 81.2.5 Multi-Stroke Positioning Mechanisms 101.3 Actuation and Sensing 111.4 Control Issues 121.5 Book Outline 14References 14Part I LARGE-RANGE TRANSLATIONAL MICROPOSITIONING SYSTEMS2 Uniaxial Flexure Stage 212.1 Concept of MCPF 212.1.1 Limitation of Conventional Flexures 212.1.2 Proposal of MCPF 232.2 Design of a Large-Range Flexure Stage 252.2.1 Mechanism Design 252.2.2 Analytical Modeling 262.2.3 Architecture Optimization 292.2.4 Structure Improvement 312.3 Prototype Development and Performance Testings 332.3.1 Statics Performance Testing 342.3.2 Dynamics Performance Testing 352.4 Sliding Mode Controller Design 352.4.1 Dynamics Modeling 352.4.2 DSMC Design 362.5 Experimental Studies 382.5.1 Plant Model Identification 382.5.2 Controller Setup 392.5.3 Set-Point Positioning Results 392.5.4 Sinusoidal Positioning Results 412.6 Conclusion 42References 443 XY Flexure Stage 453.1 Introduction 453.2 XY Stage Design 463.2.1 Decoupled XY Stage Design with MCPF 463.2.2 Buckling/Bending Effect Consideration 493.2.3 Actuation Issues 513.3 Model Verification and Prototype Development 523.3.1 Performance Assessment with FEA Simulation 523.3.2 Prototype Fabrication 543.3.3 Open-Loop Experimental Results 543.4 EMPC Control Scheme Design 553.4.1 Problem Formulation 563.4.2 EMPC Scheme Design 573.4.3 State Observer Design 603.4.4 Tracking Error Analysis 613.5 Simulation and Experimental Studies 613.5.1 Plant Model Identification 613.5.2 Controller Parameter Design 643.5.3 Simulation Studies and Discussion 643.5.4 Experimental Results and Discussion 663.6 Conclusion 67References 694 Two-Layer XY Flexure Stage 704.1 Introduction 704.2 Mechanism Design 714.2.1 Design of a Two-Layer XY Stage with MCPF 714.2.2 Structure Improvement of the XY Stage 724.3 Parametric Design 734.3.1 Motion Range Design 734.3.2 Stiffness and Actuation Force Design 744.3.3 Critical Load of Buckling 754.3.4 Resonant Frequency 754.3.5 Out-of-Plane Payload Capability 764.3.6 Influences of Manufacturing Tolerance 774.4 Experimental Studies and Results 794.4.1 Prototype Development 804.4.2 Statics Performance Testing 804.4.3 Dynamics Performance Testing 814.4.4 Positioning Performance Testing 834.4.5 Contouring Performance Testing 844.4.6 Control Bandwidth Testing 864.4.7 Discussion and Future Work 884.5 Conclusion 89References 89Part II MULTI-STROKE TRANSLATIONAL MICROPOSITIONING SYSTEMS5 Dual-Stroke Uniaxial Flexure Stage 935.1 Introduction 935.2 Mechanism Design and Analysis 945.2.1 Mechanism Design to Minimize Interference Behavior 945.2.2 Mechanism Design to Achieve Large Stroke 995.2.3 FEA Simulation and Design Improvement 1015.3 Prototype Development and Open-Loop Testing 1045.3.1 Experimental Setup 1065.3.2 Statics Performance Testing 1065.3.3 Dynamics Performance Testing 1075.4 Controller Design and Experimental Studies 1095.4.1 Controller Design 1095.4.2 Experimental Studies 1105.5 Conclusion 111References 1136 Dual-Stroke, Dual-Resolution Uniaxial Flexure Stage 1146.1 Introduction 1146.2 Conceptual Design 1156.2.1 Design of a Compliant Stage with Dual Ranges 1156.2.2 Design of a Compliant Stage with Dual Resolutions 1166.3 Mechanism Design 1176.3.1 Stiffness Calculation 1186.3.2 Motion Range Design 1196.3.3 Motor Stroke and Driving Force Requirement 1206.3.4 Sensor Deployment 1216.4 Performance Evaluation 1236.4.1 Analytical Model Results 1236.4.2 FEA Simulation Results 1246.5 Prototype Development and Experimental Studies 1256.5.1 Prototype Development 1266.5.2 Statics Performance Testing 1276.5.3 Dynamics Performance Testing 1296.5.4 Further Discussion 1316.6 Conclusion 133References 1337 Multi-Stroke, Multi-Resolution XY Flexure Stage 1357.1 Introduction 1357.2 Conceptual Design 1367.2.1 Design of Flexure Stage with Multiple Strokes 1367.2.2 Design of Flexure Stage with Multiple Resolutions 1387.3 Flexure-Based Compliant Mechanism Design 1397.3.1 Compliant Element Selection 1397.3.2 Design of a Two-Axis Stage 1407.4 Parametric Design 1417.4.1 Design of Motion Strokes 1417.4.2 Design of Coarse/Fine Sensor Resolution Ratio 1447.4.3 Actuation Issue Consideration 1457.5 Stage Performance Assessment 1467.5.1 Analytical Model Evaluation Results 1467.5.2 FEA Simulation Results 1467.6 Prototype Development and Experimental Studies 1497.6.1 Prototype Development 1497.6.2 Statics Performance Testing 1507.6.3 Dynamics Performance Testing 1547.6.4 Circular Contouring Testing 1567.6.5 Discussion 1567.7 Conclusion 159References 159Part III LARGE-RANGE ROTATIONAL MICROPOSITIONING SYSTEMS8 Rotational Stage with Linear Drive 1638.1 Introduction 1638.2 Design of MCRF 1648.2.1 Limitation of Conventional Radial Flexures 1648.2.2 Proposal of MCRF 1658.2.3 Analytical Models 1668.3 Design of a Rotary Stage with MCRF 1698.3.1 Consideration of Actuation Issues 1708.3.2 Consideration of Sensing Issues 1728.4 Performance Evaluation with FEA Simulation 1728.4.1 Analytical Model Results 1728.4.2 FEA Simulation Results 1738.4.3 Structure Improvement 1758.5 Prototype Development and Experimental Studies 1768.5.1 Prototype Development 1768.5.2 Open-Loop Performance Testing 1778.5.3 Controller Design and Closed-Loop Performance Testing 1788.5.4 Further Discussion 1818.6 Conclusion 183References 1849 Rotational Stage with Rotary Drive 1859.1 Introduction 1859.2 New Design of MCRF 1869.2.1 MCRF Design 1869.2.2 Analytical Model Not Considering Deformation 1879.2.3 Analytical Model Considering Deformation 1899.3 Design of the Rotary Stage 1929.3.1 Actuator Selection 1949.3.2 Sensor Design 1949.4 Performance Evaluation with FEA Simulation 1969.4.1 Analytical Model Results 1979.4.2 FEA Simulation Results 1979.5 Prototype Fabrication and Experimental Testing 2019.5.1 Prototype Development 2019.5.2 Statics Performance Testing 2029.5.3 Dynamics Performance Testing 2069.5.4 Discussion 2069.6 Conclusion 207References 208Part IV APPLICATIONS TO COMPLIANT GRIPPER DESIGN10 Large-Range Rotary Gripper 21310.1 Introduction 21310.1.1 Structure Design and Driving Method 21310.1.2 Sensing Requirements 21410.2 Mechanism Design and Analysis 21610.2.1 Actuation Issues 21610.2.2 Position and Force Sensing Issues 21810.3 Performance Evaluation with FEA Simulation 22210.3.1 Analytical Model Results 22210.3.2 FEA Simulation Results 22210.4 Prototype Development and Calibration 22710.4.1 Prototype Development 22710.4.2 Calibration of Position Sensor 22810.4.3 Calibration of Force Sensor 22910.4.4 Verification of Force Sensor 23010.4.5 Consistency Testing of the Sensors 23110.5 Performance Testing Results 23210.5.1 Testing of Gripping Sensing Performance 23210.5.2 Testing of Horizontal Interaction Detection 23510.5.3 Testing of Vertical Interaction Detection 23610.5.4 Testing of Dynamics Performance 23710.5.5 Applications to Pick–Transport–Place in Assembly 23810.5.6 Further Discussion 23910.6 Conclusion 242References 24211 MEMS Rotary Gripper 24411.1 Introduction 24411.2 MEMS Gripper Design 24511.2.1 Actuator Design 24611.2.2 Sensor Design 24911.3 Performance Evaluation with FEA Simulation 25111.3.1 Statics Analysis 25211.3.2 Dynamics Analysis 25411.4 Gripper Fabrication 25411.5 Experimental Results and Discussion 25511.5.1 Gripping Range Testing Results 25511.5.2 Gripping Force Testing Results 25811.5.3 Interaction Force Testing Results 26011.5.4 Demonstration of Micro-object Gripping 26111.5.5 Further Discussion 26211.6 Conclusion 264References 266Index 267

Assistant Professor Qingsong Xu, University of Macau, China, has been working in the area of micro/nano-mechatronics and robotics including design and precision control of micro/nano-positioning systems for over 10 years. He has published over 140 peer-reviewed papers in journals and conferences in related domains.

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• Preface xiiiAcknowledgments xvii1 Introduction 11.1 Micropositioning Techniques 11.2 Compliant Guiding Mechanisms 21.2.1 Basic Flexure Hinges 21.2.2 Translational Flexure Hinges 31.2.3 Translational Positioning Mechanisms 41.2.4 Rotational Positioning Mechanisms 81.2.5 Multi-Stroke Positioning Mechanisms 101.3 Actuation and Sensing 111.4 Control Issues 121.5 Book Outline 14References 14Part I LARGE-RANGE TRANSLATIONAL MICROPOSITIONING SYSTEMS2 Uniaxial Flexure Stage 212.1 Concept of MCPF 212.1.1 Limitation of Conventional Flexures 212.1.2 Proposal of MCPF 232.2 Design of a Large-Range Flexure Stage 252.2.1 Mechanism Design 252.2.2 Analytical Modeling 262.2.3 Architecture Optimization 292.2.4 Structure Improvement 312.3 Prototype Development and Performance Testings 332.3.1 Statics Performance Testing 342.3.2 Dynamics Performance Testing 352.4 Sliding Mode Controller Design 352.4.1 Dynamics Modeling 352.4.2 DSMC Design 362.5 Experimental Studies 382.5.1 Plant Model Identification 382.5.2 Controller Setup 392.5.3 Set-Point Positioning Results 392.5.4 Sinusoidal Positioning Results 412.6 Conclusion 42References 443 XY Flexure Stage 453.1 Introduction 453.2 XY Stage Design 463.2.1 Decoupled XY Stage Design with MCPF 463.2.2 Buckling/Bending Effect Consideration 493.2.3 Actuation Issues 513.3 Model Verification and Prototype Development 523.3.1 Performance Assessment with FEA Simulation 523.3.2 Prototype Fabrication 543.3.3 Open-Loop Experimental Results 543.4 EMPC Control Scheme Design 553.4.1 Problem Formulation 563.4.2 EMPC Scheme Design 573.4.3 State Observer Design 603.4.4 Tracking Error Analysis 613.5 Simulation and Experimental Studies 613.5.1 Plant Model Identification 613.5.2 Controller Parameter Design 643.5.3 Simulation Studies and Discussion 643.5.4 Experimental Results and Discussion 663.6 Conclusion 67References 694 Two-Layer XY Flexure Stage 704.1 Introduction 704.2 Mechanism Design 714.2.1 Design of a Two-Layer XY Stage with MCPF 714.2.2 Structure Improvement of the XY Stage 724.3 Parametric Design 734.3.1 Motion Range Design 734.3.2 Stiffness and Actuation Force Design 744.3.3 Critical Load of Buckling 754.3.4 Resonant Frequency 754.3.5 Out-of-Plane Payload Capability 764.3.6 Influences of Manufacturing Tolerance 774.4 Experimental Studies and Results 794.4.1 Prototype Development 804.4.2 Statics Performance Testing 804.4.3 Dynamics Performance Testing 814.4.4 Positioning Performance Testing 834.4.5 Contouring Performance Testing 844.4.6 Control Bandwidth Testing 864.4.7 Discussion and Future Work 884.5 Conclusion 89References 89Part II MULTI-STROKE TRANSLATIONAL MICROPOSITIONING SYSTEMS5 Dual-Stroke Uniaxial Flexure Stage 935.1 Introduction 935.2 Mechanism Design and Analysis 945.2.1 Mechanism Design to Minimize Interference Behavior 945.2.2 Mechanism Design to Achieve Large Stroke 995.2.3 FEA Simulation and Design Improvement 1015.3 Prototype Development and Open-Loop Testing 1045.3.1 Experimental Setup 1065.3.2 Statics Performance Testing 1065.3.3 Dynamics Performance Testing 1075.4 Controller Design and Experimental Studies 1095.4.1 Controller Design 1095.4.2 Experimental Studies 1105.5 Conclusion 111References 1136 Dual-Stroke, Dual-Resolution Uniaxial Flexure Stage 1146.1 Introduction 1146.2 Conceptual Design 1156.2.1 Design of a Compliant Stage with Dual Ranges 1156.2.2 Design of a Compliant Stage with Dual Resolutions 1166.3 Mechanism Design 1176.3.1 Stiffness Calculation 1186.3.2 Motion Range Design 1196.3.3 Motor Stroke and Driving Force Requirement 1206.3.4 Sensor Deployment 1216.4 Performance Evaluation 1236.4.1 Analytical Model Results 1236.4.2 FEA Simulation Results 1246.5 Prototype Development and Experimental Studies 1256.5.1 Prototype Development 1266.5.2 Statics Performance Testing 1276.5.3 Dynamics Performance Testing 1296.5.4 Further Discussion 1316.6 Conclusion 133References 1337 Multi-Stroke, Multi-Resolution XY Flexure Stage 1357.1 Introduction 1357.2 Conceptual Design 1367.2.1 Design of Flexure Stage with Multiple Strokes 1367.2.2 Design of Flexure Stage with Multiple Resolutions 1387.3 Flexure-Based Compliant Mechanism Design 1397.3.1 Compliant Element Selection 1397.3.2 Design of a Two-Axis Stage 1407.4 Parametric Design 1417.4.1 Design of Motion Strokes 1417.4.2 Design of Coarse/Fine Sensor Resolution Ratio 1447.4.3 Actuation Issue Consideration 1457.5 Stage Performance Assessment 1467.5.1 Analytical Model Evaluation Results 1467.5.2 FEA Simulation Results 1467.6 Prototype Development and Experimental Studies 1497.6.1 Prototype Development 1497.6.2 Statics Performance Testing 1507.6.3 Dynamics Performance Testing 1547.6.4 Circular Contouring Testing 1567.6.5 Discussion 1567.7 Conclusion 159References 159Part III LARGE-RANGE ROTATIONAL MICROPOSITIONING SYSTEMS8 Rotational Stage with Linear Drive 1638.1 Introduction 1638.2 Design of MCRF 1648.2.1 Limitation of Conventional Radial Flexures 1648.2.2 Proposal of MCRF 1658.2.3 Analytical Models 1668.3 Design of a Rotary Stage with MCRF 1698.3.1 Consideration of Actuation Issues 1708.3.2 Consideration of Sensing Issues 1728.4 Performance Evaluation with FEA Simulation 1728.4.1 Analytical Model Results 1728.4.2 FEA Simulation Results 1738.4.3 Structure Improvement 1758.5 Prototype Development and Experimental Studies 1768.5.1 Prototype Development 1768.5.2 Open-Loop Performance Testing 1778.5.3 Controller Design and Closed-Loop Performance Testing 1788.5.4 Further Discussion 1818.6 Conclusion 183References 1849 Rotational Stage with Rotary Drive 1859.1 Introduction 1859.2 New Design of MCRF 1869.2.1 MCRF Design 1869.2.2 Analytical Model Not Considering Deformation 1879.2.3 Analytical Model Considering Deformation 1899.3 Design of the Rotary Stage 1929.3.1 Actuator Selection 1949.3.2 Sensor Design 1949.4 Performance Evaluation with FEA Simulation 1969.4.1 Analytical Model Results 1979.4.2 FEA Simulation Results 1979.5 Prototype Fabrication and Experimental Testing 2019.5.1 Prototype Development 2019.5.2 Statics Performance Testing 2029.5.3 Dynamics Performance Testing 2069.5.4 Discussion 2069.6 Conclusion 207References 208Part IV APPLICATIONS TO COMPLIANT GRIPPER DESIGN10 Large-Range Rotary Gripper 21310.1 Introduction 21310.1.1 Structure Design and Driving Method 21310.1.2 Sensing Requirements 21410.2 Mechanism Design and Analysis 21610.2.1 Actuation Issues 21610.2.2 Position and Force Sensing Issues 21810.3 Performance Evaluation with FEA Simulation 22210.3.1 Analytical Model Results 22210.3.2 FEA Simulation Results 22210.4 Prototype Development and Calibration 22710.4.1 Prototype Development 22710.4.2 Calibration of Position Sensor 22810.4.3 Calibration of Force Sensor 22910.4.4 Verification of Force Sensor 23010.4.5 Consistency Testing of the Sensors 23110.5 Performance Testing Results 23210.5.1 Testing of Gripping Sensing Performance 23210.5.2 Testing of Horizontal Interaction Detection 23510.5.3 Testing of Vertical Interaction Detection 23610.5.4 Testing of Dynamics Performance 23710.5.5 Applications to Pick–Transport–Place in Assembly 23810.5.6 Further Discussion 23910.6 Conclusion 242References 24211 MEMS Rotary Gripper 24411.1 Introduction 24411.2 MEMS Gripper Design 24511.2.1 Actuator Design 24611.2.2 Sensor Design 24911.3 Performance Evaluation with FEA Simulation 25111.3.1 Statics Analysis 25211.3.2 Dynamics Analysis 25411.4 Gripper Fabrication 25411.5 Experimental Results and Discussion 25511.5.1 Gripping Range Testing Results 25511.5.2 Gripping Force Testing Results 25811.5.3 Interaction Force Testing Results 26011.5.4 Demonstration of Micro-object Gripping 26111.5.5 Further Discussion 26211.6 Conclusion 264References 266Index 267

Assistant Professor Qingsong Xu, University of Macau, China, has been working in the area of micro/nano-mechatronics and robotics including design and precision control of micro/nano-positioning systems for over 10 years. He has published over 140 peer-reviewed papers in journals and conferences in related domains.

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• Preface xiiiAcknowledgments xvii1 Introduction 11.1 Micropositioning Techniques 11.2 Compliant Guiding Mechanisms 21.2.1 Basic Flexure Hinges 21.2.2 Translational Flexure Hinges 31.2.3 Translational Positioning Mechanisms 41.2.4 Rotational Positioning Mechanisms 81.2.5 Multi-Stroke Positioning Mechanisms 101.3 Actuation and Sensing 111.4 Control Issues 121.5 Book Outline 14References 14Part I LARGE-RANGE TRANSLATIONAL MICROPOSITIONING SYSTEMS2 Uniaxial Flexure Stage 212.1 Concept of MCPF 212.1.1 Limitation of Conventional Flexures 212.1.2 Proposal of MCPF 232.2 Design of a Large-Range Flexure Stage 252.2.1 Mechanism Design 252.2.2 Analytical Modeling 262.2.3 Architecture Optimization 292.2.4 Structure Improvement 312.3 Prototype Development and Performance Testings 332.3.1 Statics Performance Testing 342.3.2 Dynamics Performance Testing 352.4 Sliding Mode Controller Design 352.4.1 Dynamics Modeling 352.4.2 DSMC Design 362.5 Experimental Studies 382.5.1 Plant Model Identification 382.5.2 Controller Setup 392.5.3 Set-Point Positioning Results 392.5.4 Sinusoidal Positioning Results 412.6 Conclusion 42References 443 XY Flexure Stage 453.1 Introduction 453.2 XY Stage Design 463.2.1 Decoupled XY Stage Design with MCPF 463.2.2 Buckling/Bending Effect Consideration 493.2.3 Actuation Issues 513.3 Model Verification and Prototype Development 523.3.1 Performance Assessment with FEA Simulation 523.3.2 Prototype Fabrication 543.3.3 Open-Loop Experimental Results 543.4 EMPC Control Scheme Design 553.4.1 Problem Formulation 563.4.2 EMPC Scheme Design 573.4.3 State Observer Design 603.4.4 Tracking Error Analysis 613.5 Simulation and Experimental Studies 613.5.1 Plant Model Identification 613.5.2 Controller Parameter Design 643.5.3 Simulation Studies and Discussion 643.5.4 Experimental Results and Discussion 663.6 Conclusion 67References 694 Two-Layer XY Flexure Stage 704.1 Introduction 704.2 Mechanism Design 714.2.1 Design of a Two-Layer XY Stage with MCPF 714.2.2 Structure Improvement of the XY Stage 724.3 Parametric Design 734.3.1 Motion Range Design 734.3.2 Stiffness and Actuation Force Design 744.3.3 Critical Load of Buckling 754.3.4 Resonant Frequency 754.3.5 Out-of-Plane Payload Capability 764.3.6 Influences of Manufacturing Tolerance 774.4 Experimental Studies and Results 794.4.1 Prototype Development 804.4.2 Statics Performance Testing 804.4.3 Dynamics Performance Testing 814.4.4 Positioning Performance Testing 834.4.5 Contouring Performance Testing 844.4.6 Control Bandwidth Testing 864.4.7 Discussion and Future Work 884.5 Conclusion 89References 89Part II MULTI-STROKE TRANSLATIONAL MICROPOSITIONING SYSTEMS5 Dual-Stroke Uniaxial Flexure Stage 935.1 Introduction 935.2 Mechanism Design and Analysis 945.2.1 Mechanism Design to Minimize Interference Behavior 945.2.2 Mechanism Design to Achieve Large Stroke 995.2.3 FEA Simulation and Design Improvement 1015.3 Prototype Development and Open-Loop Testing 1045.3.1 Experimental Setup 1065.3.2 Statics Performance Testing 1065.3.3 Dynamics Performance Testing 1075.4 Controller Design and Experimental Studies 1095.4.1 Controller Design 1095.4.2 Experimental Studies 1105.5 Conclusion 111References 1136 Dual-Stroke, Dual-Resolution Uniaxial Flexure Stage 1146.1 Introduction 1146.2 Conceptual Design 1156.2.1 Design of a Compliant Stage with Dual Ranges 1156.2.2 Design of a Compliant Stage with Dual Resolutions 1166.3 Mechanism Design 1176.3.1 Stiffness Calculation 1186.3.2 Motion Range Design 1196.3.3 Motor Stroke and Driving Force Requirement 1206.3.4 Sensor Deployment 1216.4 Performance Evaluation 1236.4.1 Analytical Model Results 1236.4.2 FEA Simulation Results 1246.5 Prototype Development and Experimental Studies 1256.5.1 Prototype Development 1266.5.2 Statics Performance Testing 1276.5.3 Dynamics Performance Testing 1296.5.4 Further Discussion 1316.6 Conclusion 133References 1337 Multi-Stroke, Multi-Resolution XY Flexure Stage 1357.1 Introduction 1357.2 Conceptual Design 1367.2.1 Design of Flexure Stage with Multiple Strokes 1367.2.2 Design of Flexure Stage with Multiple Resolutions 1387.3 Flexure-Based Compliant Mechanism Design 1397.3.1 Compliant Element Selection 1397.3.2 Design of a Two-Axis Stage 1407.4 Parametric Design 1417.4.1 Design of Motion Strokes 1417.4.2 Design of Coarse/Fine Sensor Resolution Ratio 1447.4.3 Actuation Issue Consideration 1457.5 Stage Performance Assessment 1467.5.1 Analytical Model Evaluation Results 1467.5.2 FEA Simulation Results 1467.6 Prototype Development and Experimental Studies 1497.6.1 Prototype Development 1497.6.2 Statics Performance Testing 1507.6.3 Dynamics Performance Testing 1547.6.4 Circular Contouring Testing 1567.6.5 Discussion 1567.7 Conclusion 159References 159Part III LARGE-RANGE ROTATIONAL MICROPOSITIONING SYSTEMS8 Rotational Stage with Linear Drive 1638.1 Introduction 1638.2 Design of MCRF 1648.2.1 Limitation of Conventional Radial Flexures 1648.2.2 Proposal of MCRF 1658.2.3 Analytical Models 1668.3 Design of a Rotary Stage with MCRF 1698.3.1 Consideration of Actuation Issues 1708.3.2 Consideration of Sensing Issues 1728.4 Performance Evaluation with FEA Simulation 1728.4.1 Analytical Model Results 1728.4.2 FEA Simulation Results 1738.4.3 Structure Improvement 1758.5 Prototype Development and Experimental Studies 1768.5.1 Prototype Development 1768.5.2 Open-Loop Performance Testing 1778.5.3 Controller Design and Closed-Loop Performance Testing 1788.5.4 Further Discussion 1818.6 Conclusion 183References 1849 Rotational Stage with Rotary Drive 1859.1 Introduction 1859.2 New Design of MCRF 1869.2.1 MCRF Design 1869.2.2 Analytical Model Not Considering Deformation 1879.2.3 Analytical Model Considering Deformation 1899.3 Design of the Rotary Stage 1929.3.1 Actuator Selection 1949.3.2 Sensor Design 1949.4 Performance Evaluation with FEA Simulation 1969.4.1 Analytical Model Results 1979.4.2 FEA Simulation Results 1979.5 Prototype Fabrication and Experimental Testing 2019.5.1 Prototype Development 2019.5.2 Statics Performance Testing 2029.5.3 Dynamics Performance Testing 2069.5.4 Discussion 2069.6 Conclusion 207References 208Part IV APPLICATIONS TO COMPLIANT GRIPPER DESIGN10 Large-Range Rotary Gripper 21310.1 Introduction 21310.1.1 Structure Design and Driving Method 21310.1.2 Sensing Requirements 21410.2 Mechanism Design and Analysis 21610.2.1 Actuation Issues 21610.2.2 Position and Force Sensing Issues 21810.3 Performance Evaluation with FEA Simulation 22210.3.1 Analytical Model Results 22210.3.2 FEA Simulation Results 22210.4 Prototype Development and Calibration 22710.4.1 Prototype Development 22710.4.2 Calibration of Position Sensor 22810.4.3 Calibration of Force Sensor 22910.4.4 Verification of Force Sensor 23010.4.5 Consistency Testing of the Sensors 23110.5 Performance Testing Results 23210.5.1 Testing of Gripping Sensing Performance 23210.5.2 Testing of Horizontal Interaction Detection 23510.5.3 Testing of Vertical Interaction Detection 23610.5.4 Testing of Dynamics Performance 23710.5.5 Applications to Pick–Transport–Place in Assembly 23810.5.6 Further Discussion 23910.6 Conclusion 242References 24211 MEMS Rotary Gripper 24411.1 Introduction 24411.2 MEMS Gripper Design 24511.2.1 Actuator Design 24611.2.2 Sensor Design 24911.3 Performance Evaluation with FEA Simulation 25111.3.1 Statics Analysis 25211.3.2 Dynamics Analysis 25411.4 Gripper Fabrication 25411.5 Experimental Results and Discussion 25511.5.1 Gripping Range Testing Results 25511.5.2 Gripping Force Testing Results 25811.5.3 Interaction Force Testing Results 26011.5.4 Demonstration of Micro-object Gripping 26111.5.5 Further Discussion 26211.6 Conclusion 264References 266Index 267