Chemistry in Microelectronics

Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.

• Preface ixChapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1François MARTIN, Jean-Michel HARTMANN, Véronique CARRON and Yannick LE TIEC1.1. Introduction 11.2. Arrangement of the gate 31.3. Chemistry of crystalline materials 191.4. Contact areas between the gate and the "source" and "drain" 381.5. General conclusion 571.6. List of Abbreviations 581.7. Bibliography 59Chapter 2. Chemistry in Interconnects 81Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAÎTREJEAN and Didier LOUIS2.1. Introduction 812.2. Interconnects: generalities and background 832.3. Dielectric deposits 992.4. Deposition and properties of metal layers for interconnect structures 1222.5. Cleaning process for copper interconnects 1442.6. General conclusions and perspectives 1612.7. List of Abbreviations 1642.8. Bibliography 165Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187Yannick LE TIEC and Martin KNOTTER3.1. Introduction 1873.2. Cleaning 1883.3. Wet etching 2023.4. Rinsing and drying 2143.5. Conclusion 2243.6. List of Abbreviations 2253.7. Bibliography 225Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI4.1. Ultrapure water 2334.2. Gases for semiconductors 2514.3. Dissolved gases 2684.4. High-purity chemicals 2834.5. Waste management 2904.6. List of Abbreviations 3014.7. Bibliography 303Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET5.1. Introduction 3095.2. Materials 3105.3. Functionalization process 3175.4. Molecule and macromolecule immobilization 3325.5. Analytes capture 3405.6. Conclusion 3485.7. List of Abbreviations 3495.8. Bibliography 349List of Authors 361Index 363