Subsecond Annealing of Advanced Materials

Annealing by Lasers, Flash Lamps and Swift Heavy Ions

AvWolfgang Skorupa,Heidemarie Schmidt

Inbunden, Engelska, 2013

Del 192 i serien Springer Series in Materials Science

545 kr

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Beskrivning

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.

Produktinformation

Utgivningsdatum:2013-12-30
Mått:155 x 235 x 23 mm
Vikt:652 g
Format:Inbunden
Språk:Engelska
Serie:Springer Series in Materials Science
Antal sidor:321
Upplaga:2014
Förlag:Springer International Publishing AG
ISBN:9783319031309

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Innehållsförteckning

From the Contents: The very early time.- Nanonet formation by constitutional supercooling of pulsed laser annealed, Mn-implanted germanium.- Metastable activation of dopants by solid phase epitaxial recrystallization.- Superconducting Ga-implanted Germanium.- Structural changes in SiGe/Si layers induced by fast crystallization.