J.C. Muller – författare

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1 produkter

1. 

   Rapid Thermal Processing

   Av A. Slaoui, T. Theiler m. fl.

   Inbunden, 1999

   1637 kr

   Lägg i varukorg

   Rapid Thermal Processing (RTP) is a well established single-wafer technology in USLI semiconductor manufacturing and electrical engineering, as well as in materials science. The biggest advantage of RTP is that it eliminates the long-ramp-up and ramp-down times associated with furnaces, enabling a …