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2 produkter
Microelectromechanical Systems - Materials and Devices: Volume 1052
Av David A. LaVan, Mark G. da Silva m. fl.
Inbunden, 2008
1775 kr
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This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, …
Microelectromechanical Systems: Volume 1139
Materials and Devices II
Av Srikar Vengallatore, Jörg Bagdahn m. fl.
Inbunden, 2009
1737 kr
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Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the …