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Y. -C. Joo – författare

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  1. G. S. Oehrlein, K. Maex, Y. -C. Joo, S. Ogawa, J. T. Wetzel - Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Volume 612, Häftad. Tillgänglighet: Lägg i varukorg

    Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Volume 612

    Av G. S. Oehrlein, K. Maex m. fl.

    Häftad, 2014

    461 kr

    Lägg i varukorg

    This book highlights important achievements and challenges in advanced interconnects and low-k dielectrics as employed in the microelectronics industry. The replacement of Al alloys with Cu along with the introduction of new barrier materials to protect Cu from chemical attack, and the utilization …