Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

AvJeffrey Lang

Inbunden, Engelska, 2009

Del i serien MEMS Reference Shelf

1 585 kr

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Beskrivning

Describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. This book discusses the technical details that have gone into producing the engine and the overall systems-level.

Produktinformation

Utgivningsdatum:2009-09-30
Mått:155 x 235 x 33 mm
Vikt:843 g
Format:Inbunden
Språk:Engelska
Serie:MEMS Reference Shelf
Antal sidor:456
Upplaga:2010
Förlag:Springer-Verlag New York Inc.
ISBN:9780387777467

Utforska kategorier

Elektronik och kommunikationer inom Naturvetenskap och teknik

Innehållsförteckning

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.