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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.
The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.
The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including:
materials structures and packaging
multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components
electroplating magnetic structures into silicon
very-high-speed air bearings
thermofluids and turbomachinery
electric and magnetic generators
combustion
About The MEMs Reference Shelf:
"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integratedin a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
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To stop a deadly breech to the netherworld, the Fantastic Four must seek the aid of Doctor Doom in this original sci-fi adventure novel. A grad student at Empire State University, Stanislaw Klemp, hopes to become as revered as the institution’s most famous graduate, Reed Richards—also known as Mr. Fantastic. But when he gets kicked out, Klemp discovers another path to fame: the lost notebooks of ESU’s most notorious alum, Victor von Doom. Hidden away deep underneath the library, the notebooks contain instructions for a machine that can open a portal to the netherworld. Thanks to Klemp’s meddling, someone—or something—has made its way into our world. And it isn’t friendly. Worse, the Fantastic Four are powerless to counter the threat, thanks to the agents of S.H.I.E.L.D. surrounding Manhattan with force shields. Now, the team has only one chance at stopping the evil energies seeping out of the dark dimension. They must enlist the help of their greatest enemy, the one who created the blueprint for Doomgate.
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Star Trek Deep Space Nine 3
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