Martin Prutton is the editor of Scanning Auger Electron Microscopy, published by Wiley. Mohamed M. El Gomati is the editor of Scanning Auger Electron Microscopy, published by Wiley.

"…this book fills a key gap for researchers and graduate students." (Journal of the American Chemical Society, December 27, 2006)

• List of Contributors. Preface.Acknowledgments.1. Introduction (M.M. El Gomati and M. Prutton).2. The Auger Process (J.A.D. Matthew).3. Instrumentation (M.M. El Gomati and M. Prutton).4. The Spatial Resolution (M.M. El Gomati).5. Forming an Auger Image (M.M. El Gomati and M. Prutton).6. Image Processing and Interpretation (M. Prutton).7. Quantification of Auger Images (M. Prutton).8. Applications: Materials Science (R.K. Wild).9. Applications: Semiconductor Manufacturing (C.F.H. Gondran).10. Concluding Remarks (M.M. El Gomati and M. Prutton).Author Index.Subject Index.

Martin Prutton is the editor of Scanning Auger Electron Microscopy, published by Wiley. Mohamed M. El Gomati is the editor of Scanning Auger Electron Microscopy, published by Wiley.

"…this book fills a key gap for researchers and graduate students." (Journal of the American Chemical Society, December 27, 2006)

• List of Contributors. Preface.Acknowledgments.1. Introduction (M.M. El Gomati and M. Prutton).2. The Auger Process (J.A.D. Matthew).3. Instrumentation (M.M. El Gomati and M. Prutton).4. The Spatial Resolution (M.M. El Gomati).5. Forming an Auger Image (M.M. El Gomati and M. Prutton).6. Image Processing and Interpretation (M. Prutton).7. Quantification of Auger Images (M. Prutton).8. Applications: Materials Science (R.K. Wild).9. Applications: Semiconductor Manufacturing (C.F.H. Gondran).10. Concluding Remarks (M.M. El Gomati and M. Prutton).Author Index.Subject Index.

Martin Prutton is the editor of Scanning Auger Electron Microscopy, published by Wiley. Mohamed M. El Gomati is the editor of Scanning Auger Electron Microscopy, published by Wiley.

"…this book fills a key gap for researchers and graduate students." (Journal of the American Chemical Society, December 27, 2006)

• List of Contributors. Preface.Acknowledgments.1. Introduction (M.M. El Gomati and M. Prutton).2. The Auger Process (J.A.D. Matthew).3. Instrumentation (M.M. El Gomati and M. Prutton).4. The Spatial Resolution (M.M. El Gomati).5. Forming an Auger Image (M.M. El Gomati and M. Prutton).6. Image Processing and Interpretation (M. Prutton).7. Quantification of Auger Images (M. Prutton).8. Applications: Materials Science (R.K. Wild).9. Applications: Semiconductor Manufacturing (C.F.H. Gondran).10. Concluding Remarks (M.M. El Gomati and M. Prutton).Author Index.Subject Index.