Professor G.K. Ananthasuresh is a Professor of Mechanical Engineering in the IISc, Bangalore, India. He has been working in the microsystems area since 1991 with emphasis on modeling and design. Prof. Ananthasuresh has edited the first book on Optimal Synthesis Methods for MEMS. Professor K.J. Vinoy (B.Tech., Kerala, 1991; M.Tech., Cochin, 1992; PhD, Pennsylvania State 2002) is an Associate Professor in the Department of Electrical Communication Engineering at the IISc, Bangalore. This is his third book in the area of Microsystems.Professor S. Gopalakrishnan is a Professor in the Department of Aerospace Engineering at IISc. He is a Fellow of INAE. Prof. Gopalakrishnan is the Chairman of the Aerospace Applications and Structural Health Monitoring group of the National Programme on Micro and Smart Systems.Professor K.N. Bhat was a professor at IIT Madras and is currently a Visiting Professor at IISc. He is a Fellow of the INAE. He has immensely contributed to the growth of VLSI and MEMS technology, Education and Manpower development in India.Professor V.K. Aatre was the Director General of DRDO and Scientific Adviser to the Defence Minister, Government of India. He is a Fellow of IEEE and INAE and is a recipient of the prestigious Padma Bhushan Award in India. He initiated two national programmes on Micro and Smart Systems founded the Institute of Smart Structures and Systems (ISSS).

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• About The Authors PrefaceAcknowledgmentsChapter 1 IntroductionChapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An OverviewChapter 3 Micromachining TechnologiesChapter 4 Mechanics Of Slender Solids In MicrosystemsChapter 5 Finite Element MethodChapter 6 Modeling Of Coupled Electromechanical SystemsChapter 7 Electronics Circuits And Control For Micro And Smart SystemsChapter 8 Integration Of Micro And Smart SystemsChapter 9 Scaling Effects In MicrosystemsChapter 10 Simulation Of Microsystems Using Fea SoftwareAcronymsNotationGlossaryAppendixIndex

Professor G.K. Ananthasuresh is a Professor of Mechanical Engineering in the IISc, Bangalore, India. He has been working in the microsystems area since 1991 with emphasis on modeling and design. Prof. Ananthasuresh has edited the first book on Optimal Synthesis Methods for MEMS. Professor K.J. Vinoy (B.Tech., Kerala, 1991; M.Tech., Cochin, 1992; PhD, Pennsylvania State 2002) is an Associate Professor in the Department of Electrical Communication Engineering at the IISc, Bangalore. This is his third book in the area of Microsystems.Professor S. Gopalakrishnan is a Professor in the Department of Aerospace Engineering at IISc. He is a Fellow of INAE. Prof. Gopalakrishnan is the Chairman of the Aerospace Applications and Structural Health Monitoring group of the National Programme on Micro and Smart Systems.Professor K.N. Bhat was a professor at IIT Madras and is currently a Visiting Professor at IISc. He is a Fellow of the INAE. He has immensely contributed to the growth of VLSI and MEMS technology, Education and Manpower development in India.Professor V.K. Aatre was the Director General of DRDO and Scientific Adviser to the Defence Minister, Government of India. He is a Fellow of IEEE and INAE and is a recipient of the prestigious Padma Bhushan Award in India. He initiated two national programmes on Micro and Smart Systems founded the Institute of Smart Structures and Systems (ISSS).

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• About The Authors PrefaceAcknowledgmentsChapter 1 IntroductionChapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An OverviewChapter 3 Micromachining TechnologiesChapter 4 Mechanics Of Slender Solids In MicrosystemsChapter 5 Finite Element MethodChapter 6 Modeling Of Coupled Electromechanical SystemsChapter 7 Electronics Circuits And Control For Micro And Smart SystemsChapter 8 Integration Of Micro And Smart SystemsChapter 9 Scaling Effects In MicrosystemsChapter 10 Simulation Of Microsystems Using Fea SoftwareAcronymsNotationGlossaryAppendixIndex

Professor G.K. Ananthasuresh is a Professor of Mechanical Engineering in the IISc, Bangalore, India. He has been working in the microsystems area since 1991 with emphasis on modeling and design. Prof. Ananthasuresh has edited the first book on Optimal Synthesis Methods for MEMS. Professor K.J. Vinoy (B.Tech., Kerala, 1991; M.Tech., Cochin, 1992; PhD, Pennsylvania State 2002) is an Associate Professor in the Department of Electrical Communication Engineering at the IISc, Bangalore. This is his third book in the area of Microsystems.Professor S. Gopalakrishnan is a Professor in the Department of Aerospace Engineering at IISc. He is a Fellow of INAE. Prof. Gopalakrishnan is the Chairman of the Aerospace Applications and Structural Health Monitoring group of the National Programme on Micro and Smart Systems.Professor K.N. Bhat was a professor at IIT Madras and is currently a Visiting Professor at IISc. He is a Fellow of the INAE. He has immensely contributed to the growth of VLSI and MEMS technology, Education and Manpower development in India.Professor V.K. Aatre was the Director General of DRDO and Scientific Adviser to the Defence Minister, Government of India. He is a Fellow of IEEE and INAE and is a recipient of the prestigious Padma Bhushan Award in India. He initiated two national programmes on Micro and Smart Systems founded the Institute of Smart Structures and Systems (ISSS).

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• About The Authors PrefaceAcknowledgmentsChapter 1 IntroductionChapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An OverviewChapter 3 Micromachining TechnologiesChapter 4 Mechanics Of Slender Solids In MicrosystemsChapter 5 Finite Element MethodChapter 6 Modeling Of Coupled Electromechanical SystemsChapter 7 Electronics Circuits And Control For Micro And Smart SystemsChapter 8 Integration Of Micro And Smart SystemsChapter 9 Scaling Effects In MicrosystemsChapter 10 Simulation Of Microsystems Using Fea SoftwareAcronymsNotationGlossaryAppendixIndex