Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.