Vacuum Microelectronics

WEI ZHU received his PhD in solid state science from Pennsylvania State University. He was a visiting assistant professor at North Carolina State University before he joined AT&T Bell Laboratories (later Lucent Technologies Bell Laboratories) in 1993. He is currently a member of technical staff in the Applied Materials Research Department at Agere Systems, formerly the microelectronics group of Lucent Technologies, where he specializes in carbon-based materials and applications. His interests include novel cold cathode materials and devices, nanoscale materials and technology, MEMS, and optical waveguide materials and devices. He holds more than thirty patents and has coauthored over forty papers. He organized the first Materials Research Society symposium on vacuum microelectronics in 1998. He is a member of the Materials Research Society and the Optical Society of America.

• Preface ixList of Contributors xiii1. Historical Overview 1Takao Utsumi1.1 Introduction 11.2 Shoulders’ Proposal 11.3 Groundbreaking Work 21.4 Invention of Spindt Cathode 41.5 Field Emitter Arrays 51.6 New Cathode Materials 61.7 Future 7Dedication 9References 92 Technological Overview 13Gregory P. Kochanski, Wei Zhu, and Yehuda Goren2.1 Introduction 132.2 Promise and Reality 142.3 Case Studies 152.4 Outlook 30References 313 Theory of Field Emission 33Kevin L. Jensen3.1 Introduction 333.2 One-Dimensional Tunneling Theory: Metals 353.3 Emission from Multi-Dimensional Structures 693.4 Conclusion 97Acknowledgments 98References 984 Spindt Field Emitter Arrays 105Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland and Paul R. Schwoebel4.1 Introduction 1054.2 A Brief History of the Spindt Cathode 1064.3 Fabrication Technology 1084.4 Performance 1414.5 Applications and Ongoing Developments 1794.6 Summary 181Acknowledgments 181References 1825 Silicon Field Emitter Arrays 187Jonathan Shaw and Junji Itoh5.1 Introduction 1875.2 Fabrication of Silicon FEAs 1905.3 Free Electron Theory of Field Emission 1995.4 Emission Characterization of Silicon FEAs 2055.5 Local Circuit Elements 2245.6 Summary 241Dedication 242References 2426 Novel Cold Cathode Materials 247Wei Zhu, Peter K. Baumann, and Christopher A. Bower6.1 Introduction 2476.2 Diamond Emitters 2486.3 Carbon Nanotube Emitters 2656.4 Other Cold Cathodes 2746.5 Conclusion 280References 2807 Field Emission Flat Panel Displays 289Heinz H. Busta7.1 Introduction 2897.2 Field Emission Displays 2907.3 Other Display Technologies 3347.4 Summary 341Institutions Involved inFEDCommercialization 342Acknowledgments 343References 3438 Cold Cathode Microwave Devices 349R. Allen Murphy and Mary Anne Kodis8.1 Introduction 3498.2 Microwave Amplifiers 3508.3 Field Emitter Arrays 3558.4 Characteristics of FEA-Cathode Microwave Tubes 3818.5 Future Work 385References 386Index 393