“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…” —Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter." – In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3

• Nanotechnology and Microtechnology (Nano- and Microscience, Engineering and Technology), and Beyond. Nano- and Microscale Systems, Devices, and Structures. Nano- and Microsystems: Classification and Consideration. Fundamentals of Microfabrication and MEMS Fabrication Technologies. Devising and Synthesis of NEMS and MEMS. Modeling of Micro- and Nanoscale Electromechanical Systems and Devices. Quantum Mechanics and Its Applications. Molecular and Carbon Nanoelectronics. Control of MEMS and NEMS. Examples in Synthesis, Analysis, Design and Fabrication of MEMS.

“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…” —Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter." – In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3

• Nanotechnology and Microtechnology (Nano- and Microscience, Engineering and Technology), and Beyond. Nano- and Microscale Systems, Devices, and Structures. Nano- and Microsystems: Classification and Consideration. Fundamentals of Microfabrication and MEMS Fabrication Technologies. Devising and Synthesis of NEMS and MEMS. Modeling of Micro- and Nanoscale Electromechanical Systems and Devices. Quantum Mechanics and Its Applications. Molecular and Carbon Nanoelectronics. Control of MEMS and NEMS. Examples in Synthesis, Analysis, Design and Fabrication of MEMS.

“The theoretical equations for each of the NEMS/MEMS characteristics and applications are painstakingly derived and nicely illustrated with generalized charts and schematic drawings… This second edition offers a broader coverage of topics and depth than the author’s first edition…” —Micro Nano Newsletter, Dec. 2005, Vol. 10 No. 12"This would be an excellent book for a senior undergraduate or graduate two-semester course in materials science or electrical engineering. It not only presents a good overview of important areas of development in micro and nano technology, but it also contains many examples, homework problems, and lots of references for further study at the end of each chapter." – In IEEE Electrical Insulation Magazine, May/June 2008, Vol. 24, No. 3

• Nanotechnology and Microtechnology (Nano- and Microscience, Engineering and Technology), and Beyond. Nano- and Microscale Systems, Devices, and Structures. Nano- and Microsystems: Classification and Consideration. Fundamentals of Microfabrication and MEMS Fabrication Technologies. Devising and Synthesis of NEMS and MEMS. Modeling of Micro- and Nanoscale Electromechanical Systems and Devices. Quantum Mechanics and Its Applications. Molecular and Carbon Nanoelectronics. Control of MEMS and NEMS. Examples in Synthesis, Analysis, Design and Fabrication of MEMS.