Semiconductor Gas Sensors

Raivo Jaaniso is a Senior Scientist in the Institute of Physics, University of Tartu, Estonia. Ooi Kiang Tan is Professor of Microelectronics in the School of Electrical and Electronic Engineering, Nanyang Technical University, Singapore.

• Contributor contact detailsWoodhead Publishing Series in Electronic and Optical MaterialsPart I: IntroductionChapter 1: Fundamentals of semiconductor gas sensorsAbstract:1.1 Introduction1.2 Classification of semiconductor gas sensors1.3 Resistor type sensors: empirical aspects1.4 Resistor type sensors: theoretical aspects1.5 Non-resistive sensors1.6 Future trendsChapter 2: Conduction mechanism in semiconducting metal oxide sensing films: impact on transductionAbstract:2.1 Introduction2.2 General discussion about sensing with semiconducting metal oxide gas sensors2.3 Sensing and transduction for p- and n-type semiconducting metal oxides2.4 Investigation of the conduction mechanism in semiconducting metal oxide sensing layers: studies in working conditions2.5 Conclusion and future trendsChapter 3: Electrode materials and electrode-oxide interfaces in semiconductor gas sensorsAbstract:3.1 Introduction3.2 Electrode materials for semiconductor gas sensors3.3 Electrode-oxide semiconductor interfaces3.4 Charge carrier transport in the electrode-oxide semiconductor interfaces3.5 Gas/solid interactions in the electrode-oxide semiconductor interfaces3.6 ConclusionPart II: Advanced sensing methods and structuresChapter 4: Recent trends in silicon carbide (SiC) and graphene-based gas sensorsAbstract:4.1 Introduction4.2 Background: transduction and sensing mechanisms4.3 Recent material developments for improved selectivity of SiC gas sensors4.4 Dynamic sensor operation4.5 Novel SiC and graphene-based sensor devices4.6 ConclusionChapter 5: Recent advances in wide bandgap semiconductor-based gas sensorsAbstract:5.1 Introduction5.2 Gas sensing5.3 Hydrogen sensing5.4 GaN Schottky diode sensor5.5 Nanostructured wide bandgap materials5.6 Silicon carbide Schottky diode hydrogen sensor5.7 Wireless sensor network development5.8 Conclusion5.9 AcknowledgmentsChapter 6: Micromachined semiconductor gas sensorsAbstract:6.1 Introduction6.2 A brief history of semiconductors as gas sensitive devices6.3 Micro-hotplate concept and technologies6.4 Micromachined metal-oxide gas sensors6.5 Complementary metal-oxide semiconductor (CMOS)-compatible metal-oxide gas sensors6.6 Micromachined field-effect gas sensors6.7 Trends and perspectives6.8 ConclusionChapter 7: Semiconducting direct thermoelectric gas sensorsAbstract:7.1 Introduction7.2 Direct thermoelectric gas sensors7.3 Conclusion and future trendsPart III: Nanomaterials for gas sensingChapter 8: One- and two-dimensional metal oxide nanostructures for chemical sensingAbstract:8.1 Introduction8.2 Deposition techniques8.3 Conductometric sensor8.4 Transduction principles and related novel devices8.5 Conclusion and future trendsChapter 9: Semiconductor quantum dots for photoluminescence-based gas sensingAbstract:9.1 Introduction9.2 Quantum dot synthesis, surface functionalization and polymer encapsulation9.3 Quantum dots for sensing: dependence of detection limits and selectivity on surface-modifying ligands9.4 Quantum dot–polymer system9.5 Quantum dot–nanopore array system9.6 Conclusion and future trends9.7 AcknowledgmentsChapter 10: Coated and functionalised single-walled carbon nanotubes (SWCNTs) as gas sensorsAbstract:10.1 Introduction10.2 Gas sensor architecture10.3 Gas sensing mechanisms10.4 Routes towards sensor selectivity10.5 Applications10.6 ConclusionChapter 11: Carbon nanotube and metal oxide hybrid materials for gas sensingAbstract:11.1 Introduction11.2 Fabrication and synthesis of carbon nanotube–metal oxide sensing devices11.3 Preparation of carbon nanotube–metal oxide sensing films11.4 Sensor assembly11.5 Characterization of carbon nanotube–metal oxide materials11.6 Sensing mechanism of carbon nanotube-metal oxide gas sensors11.7 ConclusionChapter 12: Porous silicon gas sensorsAbstract:12.1 Introduction12.2 Conductivity and capacitance sensors12.3 Luminescence from PSi12.4 Optical and photo properties of PSi sensors12.5 PSi noise sensors12.6 Different PSi gas sensors12.7 ConclusionPart IV: Applications of semiconductor gas sensorsChapter 13: Metal oxide semiconductor gas sensors in environmental monitoringAbstract:13.1 Introduction13.2 Sensor synthesis methods13.3 Metal oxide semiconductors in detecting environmentally important gases13.4 Advances in carbon monoxide sensors13.5 Advances in carbon dioxide sensors13.6 Advances in nitrogen oxides sensors13.7 Future trends13.8 Conclusion13.9 Sources of further information and adviceChapter 14: Semiconductor gas sensors for chemical warfare agentsAbstract:14.1 Introduction14.2 Chemical warfare agents14.3 Chemical warfare agent detecting techniques14.4 Device preparation14.5 Sensing properties14.6 ConclusionChapter 15: Integrated complementary metal oxide semiconductor-based sensors for gas and odour detectionAbstract:15.1 Introduction15.2 Micro-resistive complementary metal oxide semiconductor gas sensors15.3 Micro-calorimetric complementary metal oxide semiconductor gas sensor15.4 Sensing materials and their deposition on complementary metal oxide semiconductor gas sensors15.5 Interface circuitry and its integration15.6 Integrated multi-sensor and sensor array systems15.7 Conclusion and future trends15.8 Useful web addressesChapter 16: Solid-state sensors for carbon dioxide detectionAbstract:16.1 Introduction16.2 Electrochemical sensors16.3 Impedimetric, capacitive and resistive sensors16.4 Field effect transistor sensors16.5 New approaches to enhance sensor performance16.6 Conclusion and future trendsIndex