Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications.
