Introductory MEMS

Fabrication and Applications

AvThomas M. Adams,Richard A. Layton

Häftad, Engelska, 2014

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Beskrivning

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

Produktinformation

Utgivningsdatum:2014-09-07
Mått:155 x 235 x 27 mm
Vikt:696 g
Format:Häftad
Språk:Engelska
Antal sidor:440
Förlag:Springer-Verlag New York Inc.
ISBN:9781489984210

Utforska kategorier

Innehållsförteckning

Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.