Nanopositioning Technologies

Fundamentals and Applications

Häftad, Engelska, 2018

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Beskrivning

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.

Produktinformation

Utgivningsdatum:2018-03-30
Mått:155 x 235 x 23 mm
Vikt:628 g
Format:Häftad
Språk:Engelska
Antal sidor:409
Förlag:Springer International Publishing AG
ISBN:9783319795393

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Innehållsförteckning

1.A review of Stick-Slip Nanopositioning Actuators.- 2. Piezoelectric Motor Technology - A Review.- 3.Design of High-speed Nanopositioning Systems.- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism.- 5.Electro-magnetic Nano Positioning.- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis.- 7. Tracking Control for Nanopositioning.- 8.Position Sensors for Nanopositioning.- 9. MEMS Nanopositioners.- 10.Control Issues of MEMS nanopositioning devices.- 11. A Review of Nanomanipulation in Scanning Electron Microscopes.- 12. Nanopositioning for lithography and data storage.