Industrial Plasma Technology

Hideo Ikegami is Professor Emeritus of both Nagoya University and National Institute for Fusion Science in Nagoya, Japan. His primary interest is basic plasma physics and various plasma applications. In 1996, he created a consulting company of plasma application technology, Technowave Inc., and served as president. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007). Noriyoshi Sato has worked in research and education on plasma physics and is now Professor Emeritus at Tohoku University, Japan. His primary interest is basic plasma behaviour related to various plasma applications. He is elevating his works in collaboration with companies. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007). Akihisa Matsuda is Special Guest Professor at the Graduate School of Engineering Science of Osaka Univeristy, Japan, since 2007, after being Director of Research Initiative for Thin Film Silicon Solar Cells at the National Institute of Advanced Industrial Science and Technology (AIST), Japan. His main field of interest are plasma-process diagnostics and process control for thin film silicon solar cells. Kiichiro Uchino is currently Professor at the Department of Applied Science for Electronics and Materials at Kyushu University in Fukuoka, Japan. He is working on laser-aided diagnostics of plasmas and various industrial plasma applications. Masayuki Kuzuya is currently the Dean of College of Pharmaceutical Sciences, and Professor of Pharmaceutical Physical Chemistry at Matsuyama University, Japan. His research interest is in the field of fundamental studies of organic plasma chemistry and its bio- and pharmaceutical applications. Akira Mizuno is Professor of the Department of Ecological Engineering at Toyohashi University of Technology. His research includes applied electrostatics and high-voltage engineering, which includes electrostatic precipitation, environmental application of plasma, sterilization and other environmental friendly technologies as well as manipulation and measurement of single DNA molecules. He is editor of the International Journal of Plasma Environmental Science and Technology. Yoshinobu Kawai works as Research Professor at Interdisciplinary Graduate School of Engineering Sciences at Kyushu University, Japan, since 1974. He is expert in production of large diameter plasma in the frequency range from VHF to microwave for amorphous and microcrystalline silicon solar cell and etching. He is one of the editors of Advanced Plasma Technology (Wiley-VCH, 2007).

• PREFACEINTRODUCTION TO PLASMASPlasmasDischarge PlasmasENVIRONMENTAL APPLICATION OF NONTHERMAL PLASMAATMOSPHERIC PLASMA AIR POLLUTION CONTROL, SOLID WASTE, AND WATER TREATMENT TECHNOLOGIES: FUNDAMENTAL AND OVERVIEWIntroductionType of PlasmasPlasma ChemistryPlasma ReactorDetermination of Plasma Parameters and the Other PhenomenaEngineering and EconomicsConcluding RemarksReferencesOPTICAL DIAGNOSTICS FOR HIGH-PRESSURE NONTHERMAL PLASMA ANALYSISIntroductionExperimental ExamplesConclusionsReferencesLASER INVESTIGATIONS OF FLOW PATTERNS IN ELECTROSTATIC PRECIPITATORS AND NONTHERMAL PLASMA REACTORSIntroductionPIV Experimental SetupsConclusionsAcknowledgmentReferencesWATER PLASMAS FOR ENVIRONMENTAL APPLICATIONIntroductionWater Plasma Generation and Its Characteristics Decomposition of halogenated HydrocarbonsConclusionReferencesCHEMISTRY OF ORGANIC POLLUTANTS IN ATMOSPHERIC PLASMASIntroductionExperimental Results and DiscussionConclusions AcknowledgmentsReferencesGENERATION AND APPLICATION OF WIDE AREA PLASMAIntroductionAirFlow ControlAerodynamic Plasma ActuatorsParticle DestructionLarge Sliding DischargeConclusionReferencesNONTHERMAL PLASMA-BASED SYSTEM FOR EXHAUST TREATMENT UNDER REDUCED ATMOSPHERE OF PYROLYSIS GASESIntroductionExperimentalResultsConclusionsAcknowledgmentsReferencesPHARMACEUTICAL AND BIOMEDICAL ENGINEERING BY PLASMA TECHNIQUESIntroductionNature of Plasma-Induced Polymer RadicalsPharmaceutical Engineering for DDS Preparation by Plasma TechniquesBiomedical Engineering by Plasma TechniquesConclusionAcknowledgmentsReferencesTARGETING DENDRITIC CELLS WITH CARBON MAGNETIC NANOPARTICLES MADE BY DENSE-MEDIUM PLASMA TECHNOLOGYReferencesAPPLICATIONS OF PULSED POWER AND PLASMAS TO BIOSYSTEMS AND LIVING ORGANISMSIntroductionPulsed-Power Source Using Magnetic Pulse Compression SystemDischarge Plasmas by Pulsed PowerAction of Pulsed Power and Discharge Plasma to BiosystemSummaryReferencesAPPLICATIONS OF PLASMA POLYMERIZATION IN BIOMATERIALSIntroductionExample 1: Improving Surfaces for Blood BiocompatibilityExample 2: Foreign Body ResponseExample 3: Extended Wear Contact LensesExample 4: Platform for Immobilizing a BiomoleculeExample 5: An Improved Surface Plasmon Resonance BiosensorConclusionsReferencesPLASMA STERILIZATION AT NORMAL ATMOSPHERIC PRESSUREIntroductionExperimental SchemesExperimental ResultConclusionAcknowledgmentsReferencesELIMINATION OF PATHOGENIC BIOLOGICAL RESIDUALS BY MEANS OF LOW-PRESSURE INDUCTIVELY COUPLED PLASMA DISCHARGEIntroductionExperimentalResultsConclusionsAcknowledgmentsReferencesSTERILIZATION AND PROTEIN TREATMENT USING OXYGEN RADICALS PRODUCED BY RF DISCHARGEIntroductionExperimental ProcedureGeneration of Oxygen RadicalsSterilization of Medical EquipmentsDecomposition of Protein´s StructureReferencesHYDROPHILICITY AND BIOACTIVITY OF A POLYETHYLENE TEREPHTHALATE SURFACE MODIFIED BY PLASMA-INITIATED GRAFT POLYMERIZATIONIntroductionExperimentalResults and DiscussionConclusionsReferencesSTRATEGIES AND ISSUES ON THE PLASMA PROCESSING OF THIN-FILM SILICON SOLAR CELLSIntroductionGrowth Process of a-Si: H and µc-Si : H by PECVDGrowth of High-Quality a-Sie : HConcept of Protocrystal a-Si : H (Stable a-Sie : H)Growth of High-Quality µc-Si : HSummaryReferenceCHARACTERISTICS OF VHF PLASMA WITH LARGE AREAIntroductionDevelopment of Balanced Power Feeding MethodCharacteristics of VHF PlasmaSummaryReferencesDEPOSITION OF A-SI : H FILMS WITH HIGH STABILITY AGAINST LIGHT EXPOSURE BY REDUCING DEPOSITION OF NANOPARTICLES FORMED IN SIH4 DISCHARGESIntroductionFormation Mechanism of Nanoparticles in Silane DischargesContribution of Higher Order Silane Molecules and Nanoparticles to SiH2 Bond Formation in FilmsEffects of Nanoparticles on a-Si : H QualitiesHigh Rate Deposition of a-Si : H Films of High Stability against Light Exposure Using Multihollow Discharge Plasma CVDConclusions AcknowledgmentsReferencesDIAGNOSTICS AND MODELING OF SIH4/H2 PLASMAS FOR THE DEPOSITION OF MICROCRYSTALLINE SILICON: THE CASE OF DUAL-FREQUENCY SOURCESIntroductionExperimentalModel DescriptionResults and DiscussionConclusionsAcknowledgmentsReferencesINTRODUCTION TO DIAMOND-LIKE CARBONSDIAMOND-LIKE CARBON FOR APPLICATIONSIntroductionGrowth RatesBasic PropertiesStressApplications of DLCMEMsElectronic ApplicationsBioactive Surfaces ConclusionsAcknowledgmentsReferencesAPPLICATIONS OF DLCS TO BIOPROCESSINGIntroductionHigh-Tenacity DLC Tin Films for StentsApplications of DLC Films to Coronary Drug-Eltuing StentDLC Films with Controlled Zeta Potential of BiomaterialsCharacerization of Biomimetic DLC and In vitro Biocompatibility EvaluationConclusionAcknowledgmentsReferencesPLASMA PROCESSING OF NANOCRYSTALLINE SEMICONDUCTIVE CUBIC BORON NITRIDE THIN FILMSIntroductionFundamental Properties of cBNGrowth of cBN Thin FilmsDoping Processes and Electrical CharacterizationConclusionReferencesFUNDAMENTALS ON TRIBOLOGY OF PLASMA-DEPOSITED DIAMOND-LIKE CARBON FILMSIntroductionSpecial Case of DLC CoatingsSuperlubricity of DLC CoatingsConclusionReferencesDIAMOND-LIKE CARBON THIN FILMS GROWN IN PULSED-DC PLASMASIntroductionExperimental DetailsResults and DiscussionConclusionsAcknowledgmentsReferencesPLASMA DEPOSITION OF N-TIO2 THIN FILMSIntroductionExperimental Setup and Diagnostic TechniquesResults and DiscussionAcknowledgmentsReferencesINVESTIGATION OF DLC AND MULTILAYER COATINGS HYDROPHOBIC CHARACTER FOR BIOMEDICAL APPLICATIONSIntroductionExperimental SetupResults and DiscussionsConclusionsAcknowledgmentsReferencesCREATION OF NOVEL ELECTROMAGNETIC AND REACTIVE MEDIA FROM MICROPLASMASIntroductionMicroplasma in Single Use as PlasmaMicroplasma Integration for Large-Area Material ProcessingMicroplasma Integration for Electromagnetic MediaConcluding Remarks and PerspectivesAcknowledgmentsReferencesNANOBLOCK ASSEMBLY USING PULSE RF DISCHARGES WITH AMPLITUDE MODULATIONIntroductionFormation of Nanoblocks and Their AgglomerationAssembly of Nanoblocks in Gas Phase Using AgglomerationConlusionsAcknowledgmentsReferencesTHOMSON SCATTERING DIAGNOSTICS OF DISCHARGE PLASMASIntroductionApplication to Low-Pressure PlasmasDiagnostics of PDP PlasmasDiagnostics of EUV PlasmasCRYSTALLIZED NANODUST PARTICLES GROWTH IN LOW-PRESSURE COLD PLASMASIntroductionDescription of the Experimental SetupDetection of Nanocrystallites Formation in the Plasma Gas PhaseAtomic Structure of the NanocrystallitesSize and Crystalline Volume Fraction MeasurementsGas Temperature Effects on Dust Nanoparticle Nucleation and GrowthConclusionsReferencesCOLLECTION AND REMOVAL OF FINE PARTICLES IN PLASMA CHAMBERSIntroductionNFP-collectorDitch GudancePlate CleaningEffects on Particles Produced in PlasmasConclusionsAcknowledgmentsReferences INDEX