Introduction to Spectroscopic Ellipsometry of Thin Film Materials

Andrew T.S. Wee, DPhil, is Professor of Physics and Director of the Surface Science Laboratory at the National University of Singapore (NUS). His research is focused on surface and nanoscale science, scanning tunnelling microscopy, and synchrotron radiation studies of the molecule-substrate interface.Xinmao Yin, PhD, is Professor of Physics at the Shanghai University, China. His research is focused on quantum materials and broad energy range optical spectroscopic techniques.Chi Sin Tang is scientist at the Institute of Materials Research and Engineering, Agency for Science Technology and Research (A*STAR), Singapore. His research is focused on the electronic and optical properties of low-dimensional materials.

• Preface ix1 Spectroscopic Ellipsometry: Basic Principles 11.1 Spectroscopic Ellipsometry 11.2 Principles of Ellipsometric Measurements 51.3 Experimental Setup 71.4 Spectroscopic Ellipsometry: General Profiles 101.5 Ellipsometric Datafor Multilayered System 111.6 Dielectric Models 121.7 Chapter Summary 182 Strongly Correlated Systems: Cuprates and Manganites 192.1 Introduction 192.2 High-Transition-Temperature Superconducting Cuprates 192.3 Colossal Magnetoresistance Manganites 262.4 Charge Localization in Cuprate Thin Filmon Oxide Substrate 372.5 Plasmon and High-Energy Exciton Excitations in Cuprate Thin Films 402.6 Jahn–Teller Splitting Energy Controls the Phase Transition in Manganite Thin-Film Systems 453 Two-Dimensional Transition Metal Dichalcogenides 593.1 Introduction 593.2 Crystal Structures of 2D-TMDs 593.3 Ellipsometry in Probing Structural Phase Transition and Electronic Structures Monolayer-MoS2 683.4 Three-Dimensional Resonant Exciton in Monolayer-WSe2 873.5 Anisotropic Plasmon Excitations in Quasi-Metallic 2D-TMDs 1064 Single-Layer Graphene Systems 1314.1 Introduction 1314.2 Crystal and Electronic Structure of Graphene 1314.3 Optoelectronic Properties of Graphene 1344.4 Spectroscopic Ellipsometry Study of Graphene 1354.5 Resonant Excitons in Graphene 1374.6 Substrate-Induced Manipulation of Many-Body Effects 1384.7 Conclusion and Outlook 1415 Nickelate Systems 1495.1 Introduction 1495.2 Crystal Structure 1495.3 Electronic Structures and Ni3d-Orbital Physics 1505.4 Phase Diagram and Metal–Insulator Transitions of RNiO3 Systems 1515.5 Optical Characterization via Spectroscopic Ellipsometry 1535.6 Conclusion and Outlook 1596 Future Development and Applications of Spectroscopic Ellipsometry 1676.1 Development of Mueller Matrix Imaging Techniques in Spectroscopic Ellipsometry 1676.2 In Situ Analysis of Langmuir Monolayers 1696.3 Emergent Properties at Two-Dimensional Interfaces 1706.4 Micro Devices and Integrated Circuits 1716.5 Metamaterial Research 1726.6 Organic Electronics 1726.7 Biological Materials and Medicines 1736.8 Anisotropic Materials 1736.9 Process Control Analysis 173References 174Index 181