This comprehensive second edition was modified to meet the needs of the semiconductor industry regarding the education of properly trained personnel. In an easy-to-follow fashion, which does not require extensive engineering nor scientific background, this book explains the properties of semiconductor materials distinguishing them among other solids, introduces key semiconductor devices, discusses major elements of semiconductor process technology, then considers fabrication processes used in semiconductor device engineering and the ways to control them by monitoring properties of processed materials. A list of review questions is included at the end of each chapter.Based on the author's fifty years of research and teaching at major research universities, this unique reference text caters also to undergraduate and graduate students, as well as professionals interested in broadening their knowledge of semiconductor engineering.
