A. Katz – författare

This book addresses the need to resolve the ITZ's influence on engineering and durability characteristics of cementious composites, identifies the systems and properties that are affected by it, and quantifies these effects in order to prepare the base for engineering design tools. This volume presents the proceedings of the Second International RILEM conference on the Interfacial Transition Zone in cementious composites, held in Haifa, Israel in 1998.

This book addresses the need to resolve the ITZ's influence on engineering and durability characteristics of cementious composites, identifies the systems and properties that are affected by it, and quantifies these effects in order to prepare the base for engineering design tools. This volume presents the proceedings of the Second International RILEM conference on the Interfacial Transition Zone in cementious composites, held in Haifa, Israel in 1998.

Single chamber processing has attracted the attention of a number of researchers as well as industries as an alternative processing "philosophy" to complement or even replace the stringent environment of micro- and optoelectronics device fabrication. Up till now single chamber processing has been an elusive manufacturing objective throughout the history of integrated circuit technology. With the emergence of integrated processing tools in recent years, significant segments for continuous fabrication processes have been successfully realised and their potential has already innovated the industry.The 14 papers in this volume cover topics such as: The background of this approach and up-dated status; Design and concepts of relevant cluster tools equipment; Specific process modules such as deposition chambers (CVD, RTCVD, UVCVD, ...) annealing or etching reactors; and Standardization efforts. The work will provide both a stimulus for future research in this field, as well as useful reference material on the new technology trends in microelectronic device manufacturing technology.

This book addresses the need to resolve the ITZ''s influence on engineering and durability characteristics of cementious composites, identifies the systems and properties that are affected by it, and quantifies these effects in order to prepare the base for engineering design tools. This volume presents the proceedings of the Second International RI