Alfred K. Wong – författare
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1 produkter
Optical Imaging in Projection Microlithography
Häftad, 2005
753 kr
Lägg i varukorg
Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into …