Allan J. Lichtenberg – författare
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3 produkter
Principles of Plasma Discharges and Materials Processing
Av Michael A. Lieberman, Allan J. Lichtenberg
Inbunden, 2024
1373 kr
Lägg i varukorg
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to …
Principles of Plasma Discharges and Materials Processing
Av Allan J. Lichtenberg, Michael A. Lieberman
E-bok, 2024
1597 kr
Lägg i varukorg
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to …
Principles of Plasma Discharges and Materials Processing
Av Allan J. Lichtenberg, Michael A. Lieberman
E-bok, 2024
1562 kr
Lägg i varukorg
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to …
