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  1. C.E. Morosanu, G. Siddall - Thin Films by Chemical Vapour Deposition, E-bok. Tillgänglighet: Lägg i varukorg

    Thin Films by Chemical Vapour Deposition

    Av C.E. Morosanu, G. Siddall

    E-bok, 2016

    1045 kr

    Lägg i varukorg

    The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several …