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1 produkter
Thin Films by Chemical Vapour Deposition
E-bok, 2016
1045 kr
Lägg i varukorg
The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several …