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Ion Implantation into Semiconductors, Oxides and Ceramics
Av B.G. Svensson, H.A. Atwater m. fl.
Inbunden, 1999
2288 kr
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These proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of the European Materials Research Society in Strasbourg, France, 16-19, June 1998. The symposium attracted 110 …