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  1. Hattori, Takeshi Hattori - Ultraclean Surface Processing of Silicon Wafers, Inbunden. Tillgänglighet: Lägg i varukorg

    Ultraclean Surface Processing of Silicon Wafers

    Secrets of VLSI Manufacturing

    Av Hattori, Takeshi Hattori

    Inbunden, 1998

    3272 kr

    Lägg i varukorg

    A totally new concept for clean surface processing of Si wafers is introduced in this book. Some fifty distinguished researchers and engineers from the leading Japanese semiconductor companies, such as NEC, Hitachi, Toshiba, Sony and Panasonic as well as from several universities reveal to us for …