Jianfeng Luo – författare
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3 produkter
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
From Particle Scale to Feature, Die and Wafer Scales
Av Jianfeng Luo, David A. Dornfeld
Inbunden, 2004
1637 kr
Lägg i varukorg
Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years …
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
From Particle Scale to Feature, Die and Wafer Scales
Av Jianfeng Luo, David A. Dornfeld
Häftad, 2010
1637 kr
Lägg i varukorg
Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years …
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication
From Particle Scale to Feature, Die and Wafer Scales
Av David A. Dornfeld, Jianfeng Luo
E-bok, 2013
2111 kr
Lägg i varukorg
Chemical mechanical planarization, or chemical mechanical polishing as it is simultaneously referred to, has emerged as one of the critical processes in semiconductor manufacturing and in the production of other related products and devices, MEMS for example. Since its introduction some 15+ years …