Matthew Healy – författare

Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include an introduction to vacuum and end-uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas–solid interactions, vacuum pump technology, pressure sensors, leak detection, and the impact of fundamental design decisions and operating practices on vacuum system performance.The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail.The book also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultrahigh vacuum, as well as trade-offs in system design. These perspectives will allow the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.- Covers vacuum pump technology, taking a system from atmosphere down to high or ultra-high vacuum- Discusses the fundamental descriptions of vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach- Provides an overview of practical vacuum system operating techniques that will ensure optimal performance and troubleshooting methods to identify system deficiencies

Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 2: Creating and Measuring Vacuum reviews the many specialized components that must be effectively integrated to create, support, and measure vacuum. This includes pipes, valves, flexible bellows, and several types of vacuum pumps, including rotary vane, dry scroll, turbomolecular, and cryogenic varieties. Pressure sensors are also reviewed with specific attention to their operating principles, pressure range, accuracy, reproducibility, and calibration. The unique features of various vacuum components are highlighted to aid in the selection of devices appropriate for specific pressure ranges and operating conditions. This volume informs the reader about critical vacuum components and how they can be integrated in a complete, dynamically pumped, vacuum system. The specific nuances related to pressure ranges and vacuum component characteristics are featured. Design considerations, such as vacuum gauge placement relative to active gas flows, pressure differentials, and pressure control approaches are also discussed.