P. Wagner – författare

The activities of the semiconductor industry to introduce a new, large wafer diameter were triggered by expected potential overall savings - cost and resource - and an anticipated increasing demand for Silicon wafers. In the beginning, around 1994, agreement on the diameter of the next wafer generation had to be achieved and finally 300 mm was globally accepted to be the next wafer diameter, a decision obtained at international summits in 1994/1995, based on the work of a SEMI task force.

Several workshops on 300 mm wafers have been held by SEMI, JSNM and other organizations during the past few years. However, the present E-MRS conference on Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modeling and Equipment was the first international scientific conference about this subject.

The papers - invited as well as submitted - cover a wide range of subjects, financial issues, fab concepts, crystal growth, wafer process development, material and defect issues, wafer characterization and provide an excellent review of the present status of 300 mm technology.

This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities.In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.

This volume's aim is to provide an introduction to Carnap's book from a historical and philosophical perspective, each chapter focusing on one specific issue. The book will be of interest not only to Carnap scholars but to all those interested in the history of analytical philosophy.

This volume''s aim is to provide an introduction to Carnap''s book from a historical and philosophical perspective, each chapter focusing on one specific issue. The book will be of interest not only to Carnap scholars but to all those interested in the history of analytical philosophy.

The book consists of a series of chapters on Carnap's ideal of explication as an alternative to the naturalistic conceptions of science, setting it in its historical context, discussing specific cases of explications, and enriching the on-going debate on conceptual engineering and naturalism in analytic philosophy.

The book consists of a series of chapters on Carnap''s ideal of explication as an alternative to the naturalistic conceptions of science, setting it in its historical context, discussing specific cases of explications, and enriching the on-going debate on conceptual engineering and naturalism in analytic philosophy.

The book consists of a series of chapters on Carnap's ideal of explication as an alternative to the naturalistic conceptions of science, setting it in its historical context, discussing specific cases of explications, and enriching the on-going debate on conceptual engineering and naturalism in analytic philosophy.