Pilar Gonzalez Ruiz – författare
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3 produkter
Poly-SiGe for MEMS-above-CMOS Sensors
Av Pilar Gonzalez Ruiz, Kristin De Meyer m. fl.
Inbunden, 2013
1082 kr
Lägg i varukorg
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead …
Poly-SiGe for MEMS-above-CMOS Sensors
Av Ann Witvrouw, Kristin De Meyer m. fl.
E-bok, 2013
1459 kr
Lägg i varukorg
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead …
Poly-SiGe for MEMS-above-CMOS Sensors
Av Pilar Gonzalez Ruiz, Kristin De Meyer m. fl.
Häftad, 2015
1082 kr
Lägg i varukorg
Polycrystalline SiGe has emerged as a promising MEMS (Microelectromechanical Systems) structural material since it provides the desired mechanical properties at lower temperatures compared to poly-Si, allowing the direct post-processing on top of CMOS. This CMOS-MEMS monolithic integration can lead …