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Materials and Processes for Submicron Technologies
Av J.M. Martinez-Duart, R. Madar m. fl.
Inbunden, 1999
1637 kr
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The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France. The purpose of this meeting was to discuss the results of the advances in microelectronic devices …
