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Reliability of MEMS
Testing of Materials and Devices
Av Toshiyuki Tsuchiya, Osamu Tabata
E-bok, 2013
1345 kr
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This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general …