Yafei Zhang - Böcker

The discovery of multiwalled carbon nanotubes(CNTs) in 1991 and the subsequent discovery of single-walled CNTs in 1993 have led to a worldwide excitement to explore their fundamental properties and potential device applications. A sing- walled CNT is structurally a sheet of graphene rolled into a seamless tube, which possesses a diameter of the order of a nanometer but a length thousands of times greater. The large aspect ratio and small cross section size make it nearly an ideal, quasi-one-dimensionalsystem, which has provided a concrete context for chemists, physicists,andengineersto collaborativelyworktogetherin the?eld ofnanoscience and nanotechnology. As a result of such efforts in the last two decades, superior electrical, optical, and mechanical properties of CNTs have been theoretically p- dicted and experimentally demonstrated. The unique material properties of CNTs have made it interesting for a variety of applications. For example, depending on the orientation of its graphene lattice relative to the nanotube axis, the CNT can be either metallic or semiconducting.This property makes the material interesting for developing not only nanoscale semiconductor devices but also a new interc- nect technologyto competewith the state-of-theart copperinterconnecttechnology. The property has also imposed yet-solved challenges in the ?eld. For example, one of the major challenges that holds CNTs back from electronic application is how to produce pure all-semiconducting CNTs, based on which a device that can be effectively turned off can be built.

The discovery of multiwalled carbon nanotubes(CNTs) in 1991 and the subsequent discovery of single-walled CNTs in 1993 have led to a worldwide excitement to explore their fundamental properties and potential device applications. A sing- walled CNT is structurally a sheet of graphene rolled into a seamless tube, which possesses a diameter of the order of a nanometer but a length thousands of times greater. The large aspect ratio and small cross section size make it nearly an ideal, quasi-one-dimensionalsystem, which has provided a concrete context for chemists, physicists,andengineersto collaborativelyworktogetherin the?eld ofnanoscience and nanotechnology. As a result of such efforts in the last two decades, superior electrical, optical, and mechanical properties of CNTs have been theoretically p- dicted and experimentally demonstrated. The unique material properties of CNTs have made it interesting for a variety of applications. For example, depending on the orientation of its graphene lattice relative to the nanotube axis, the CNT can be either metallic or semiconducting.This property makes the material interesting for developing not only nanoscale semiconductor devices but also a new interc- nect technologyto competewith the state-of-theart copperinterconnecttechnology. The property has also imposed yet-solved challenges in the ?eld. For example, one of the major challenges that holds CNTs back from electronic application is how to produce pure all-semiconducting CNTs, based on which a device that can be effectively turned off can be built.

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.